Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588036 | Chamber clean method using remote and in situ plasma cleaning systems | Zhenjiang Cui, Michael S. Cox, Canfeng Lai | 2009-09-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588036 | Chamber clean method using remote and in situ plasma cleaning systems | Zhenjiang Cui, Michael S. Cox, Canfeng Lai | 2009-09-15 |