SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 251–275 of 365 patents

Patent #TitleCo-InventorsDate
8264086 Via structure with improved reliability Cheng-Lin Huang, Ching-Hua Hsieh 2012-09-11
8252682 Method for thinning a wafer Ku-Feng Yang, Weng-Jin Wu, Hsin-Hsien Lu, Chia-Lin Yu, Chu-Sung Shih +1 more 2012-08-28
8252665 Protection layer for adhesive material at wafer edge Wen-Chih Chiou, Weng-Jin Wu 2012-08-28
8236579 Methods and systems for lithography alignment Hsiao-Tzu Lu, Hung-Chang Hsieh, Kuei-Shun Chen, Hsueh-Hung Fu, Ching-Hua Hsieh 2012-08-07
8202799 Methods of manufacturing metal-silicide features Chen-Tung Lin, Chih-Wei Chang, Chii-Ming Wu, Mei-Yun Wang, Chaing-Ming Chuang 2012-06-19
8178437 Barrier material and process for Cu interconnect Chung-Liang Chang, Ching-Hua Hsieh 2012-05-15
8106512 Low resistance high reliability contact via and metal line structure for semiconductor device Hsiang-Huan Lee, Ming-Han Lee, Ming-Shih Yeh, Chen-Hua Yu 2012-01-31
8101489 Approach to reduce the contact resistance Ting-Chu Ko 2012-01-24
8053357 Prevention of post CMP defects in CU/FSG process Chung-Shi Liu 2011-11-08
7988843 Method and apparatus for electrochemical plating semiconductor wafers Chung-Liang Chang 2011-08-02
7888719 Semiconductor memory structures Chao-An Jong 2011-02-15
7883991 Temporary carrier bonding and detaching processes Wen-Jin Wu, Wen-Chih Chiou 2011-02-08
7781316 Methods of manufacturing metal-silicide features Chen-Tung Lin, Chih-Wei Chang, Chii-Ming Wu, Mei-Yun Wang, Chiang-Ming Chuang 2010-08-24
7777344 Transitional interface between metal and dielectric in interconnect structures Chien-Hsueh Shih 2010-08-17
7704368 Method and apparatus for electrochemical plating semiconductor wafers Chung-Liang Chang 2010-04-27
7700479 Cleaning processes in the formation of integrated circuit interconnect structures Cheng-Lin Huang, Ching-Hua Hsieh 2010-04-20
7682963 Air gap for interconnect application Hai-Ching Chen, Sunil Kumar Singh, Tien-I Bao, Chen-Hua Yu 2010-03-23
7659198 In-situ deposition for Cu hillock suppression Chung-Hsien Chen, Chun-Chieh Lin, Minghsing Tsai 2010-02-09
7625801 Silicide formation with a pre-amorphous implant Chii-Ming Wu, Cheng-Tung Lin, Chih-Wei Chang 2009-12-01
7612451 Reducing resistivity in interconnect structures by forming an inter-layer Chih-Chao Shih, Cheng-Lin Huang, Ching-Hua Hsieh 2009-11-03
7538434 Copper interconnection with conductive polymer layer and method of forming the same Chien-Hsueh Shih, Minghsing Tsai, Hung-Wen Su 2009-05-26
7514348 Sidewall coverage for copper damascene filling Mei-Yun Wang, Chen-Hua Yu 2009-04-07
7501333 Work function adjustment on fully silicided (FUSI) gate Wei-Jung Lin, Cheng-Tung Lin, Chih-Wei Chang 2009-03-10
7446042 Method for silicide formation on semiconductor devices Chii-Ming Wu, Shih-Wei Chou, Gin Jei Wang, Cheng-Tung Lin, Chih-Wei Chang 2008-11-04
7443029 Adhesion of copper and etch stop layer for copper alloy Jing-Cheng Lin, Ching-Hua Hsieh, Mong-Song Liang 2008-10-28