SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 201–225 of 365 patents

Patent #TitleCo-InventorsDate
9466525 Interconnect structures comprising flexible buffer layers Chao-Hsien Peng, Hsin-Yen Huang, Hsiang-Huan Lee 2016-10-11
9449875 Wafer backside interconnect structure connected to TSVs Ming-Fa Chen, Wen-Chih Chiou 2016-09-20
9437540 Additional etching to increase via contact area Pei-Yi Lin, Chung-Ju Lee 2016-09-06
9431297 Method of forming an interconnect structure for a semiconductor device Yung-Hsu Wu, Cheng-Hsiung Tsai, Yu-Sheng Chang, Chia-Tien Wu, Chung-Ju Lee +4 more 2016-08-30
9418868 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2016-08-16
9412649 Method of fabricating semiconductor device Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2016-08-09
9385029 Method for forming recess-free interconnect structure Chao-Hsien Peng, Hsiang-Huan Lee 2016-07-05
9384994 Method of forming multiple patterning spacer structures Chih Wei Lu, Chung-Ju Lee 2016-07-05
9343400 Dual damascene gap filling process Hsiang-Huan Lee 2016-05-17
9330989 System and method for chemical-mechanical planarization of a metal layer Yung-Hsu Wu, Shih-Kang Fu, Hsin-Chieh Yao, Hsiang-Huan Lee, Chung-Ju Lee +1 more 2016-05-03
9318439 Interconnect structure and manufacturing method thereof Shin-Yi Yang, Hsi-Wen Tien, Ming-Han Lee, Hsiang-Huan Lee 2016-04-19
9318364 Semiconductor device metallization systems and methods Hsiang-Huan Lee, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more 2016-04-19
9305837 Semiconductor arrangement and formation thereof Chia-Tien Wu, Tien-Lu Lin 2016-04-05
9293413 Semiconductor devices and methods of manufacture thereof Hsin-Chieh Yao, Chung-Ju Lee, Tien-I Bao 2016-03-22
9269668 Interconnect having air gaps and polymer wrapped conductive lines Shin-Yi Yang, Hsiang-Huan Lee, Ming-Han Lee, Hsi-Wen Tien 2016-02-23
9252049 Method for forming interconnect structure that avoids via recess Chao-Hsien Peng, Tsung-Min Huang, Hsiang-Huan Lee 2016-02-02
9230911 Interconnect structure and method of forming the same Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Tien-I Bao 2016-01-05
9224643 Structure and method for tunable interconnect scheme Chung-Ju Lee, Tien-I Bao, Ming-Shih Yeh, Hai-Ching Chen 2015-12-29
9219033 Via pre-fill on back-end-of-the-line interconnect layer Chao-Hsien Peng, Chi-Liang Kuo, Ming-Han Lee, Hsiang-Huan Lee 2015-12-22
9209076 Method of double patterning lithography process using plurality of mandrels for integrated circuit applications Hsin-Chieh Yao, Chung-Ju Lee, Yung-Hsu Wu, Tien-I Bao 2015-12-08
9177797 Lithography using high selectivity spacers for pitch reduction Yu-Sheng Chang, Chung-Ju Lee, Cheng-Hsiung Tsai, Yung-Hsu Wu, Hsiang-Huan Lee +5 more 2015-11-03
9159579 Lithography using multilayer spacer for reduced spacer footing Chao-Hsien Peng, Hsiang-Huan Lee 2015-10-13
9153478 Spacer etching process for integrated circuit design Ru-Gun Liu, Shih-Ming Chang, Ken-Hsien Hsieh, Ming-Feng Shieh, Chih-Ming Lai +6 more 2015-10-06
9142509 Copper interconnect structure and method for forming the same Chen-Hua Yu, Hsiang-Huan Lee, Ching-Fu Yeh 2015-09-22
9136106 Method for integrated circuit patterning Chieh-Han Wu, Chung-Ju Lee, Cheng-Hsiung Tsai, Ming-Feng Shieh, Ru-Gun Liu +1 more 2015-09-15