Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362233 | Methods of performing chemical-mechanical polishing process in semiconductor devices | Ming-Han Lee, Shau-Lin Shue | 2025-07-15 |
| 12342600 | Titanium-containing diffusion barrier for CMP removal rate enhancement and contamination reduction | Ming-Han Lee, Shau-Lin Shue | 2025-06-24 |
| 12205886 | Hybrid method for forming semiconductor interconnect structure | Ming-Han Lee, Shau-Lin Shue | 2025-01-21 |
| 11810816 | Chemical mechanical polishing topography reset and control on interconnect metal lines | Ming-Han Lee | 2023-11-07 |
| 11742239 | Methods of performing chemical-mechanical polishing process in semiconductor devices | Ming-Han Lee, Shau-Lin Shue | 2023-08-29 |
| 11545389 | Titanium-containing diffusion barrier for CMP removal rate enhancement and contamination reduction | Ming-Han Lee, Shau-Lin Shue | 2023-01-03 |
| 11450602 | Hybrid method for forming semiconductor interconnect structure | Ming-Han Lee, Shau-Lin Shue | 2022-09-20 |
| 11342219 | Chemical mechanical polishing topography reset and control on interconnect metal lines | Ming-Han Lee | 2022-05-24 |
| 11211256 | Method with CMP for metal ion prevention | Ming-Han Lee, Shau-Lin Shue | 2021-12-28 |
| 11152255 | Methods of performing chemical-mechanical polishing process in semiconductor devices | Ming-Han Lee, Shau-Lin Shue | 2021-10-19 |
| 11127680 | Semiconductor device and manufacturing method thereof | Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee, Shau-Lin Shue | 2021-09-21 |
| 10879115 | Semiconductor device and forming method thereof | Ming-Han Lee, Meng-Pei Lu, Shau-Lin Shue | 2020-12-29 |
| 10163700 | Method for forming conductive structure using polishing process | Ming-Han Lee | 2018-12-25 |
| 9721894 | Semiconductor device and manufacturing method thereof | Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee, Shau-Lin Shue | 2017-08-01 |
| 9530737 | Semiconductor device and manufacturing method thereof | Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee, Shau-Lin Shue | 2016-12-27 |
| 9330989 | System and method for chemical-mechanical planarization of a metal layer | Yung-Hsu Wu, Hsin-Chieh Yao, Hsiang-Huan Lee, Chung-Ju Lee, Hai-Ching Chen +1 more | 2016-05-03 |