LS

Li-Lin Su

TSMC: 20 patents #1,647 of 12,232Top 15%
Overall (All Time): #216,833 of 4,157,543Top 6%
20
Patents All Time

Issued Patents All Time

Showing 1–20 of 20 patents

Patent #TitleCo-InventorsDate
12062611 Integrated circuit interconnect structures with air gaps Tai-I Yang, Yung-Hsu Wu, Hsin-Ping Chen, Cheng-Chi Chuang 2024-08-13
11860550 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Yung-Hsu Wu 2024-01-02
11422475 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Yung-Hsu Wu 2022-08-23
11251131 Copper contact plugs with barrier layers Ching-Hua Hsieh, Huang-Ming Chen, Hsueh Wen Tsau 2022-02-15
11244898 Integrated circuit interconnect structures with air gaps Tai-I Yang, Yung-Hsu Wu, Hsin-Ping Chen, Cheng-Chi Chuang 2022-02-08
11127680 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Ming-Han Lee, Shau-Lin Shue 2021-09-21
11088020 Structure and formation method of interconnection structure of semiconductor device Tai-I Yang, Wei-Chen Chu, Shin-Yi Yang, Cheng-Chi Chuang, Hsin-Ping Chen 2021-08-10
10700010 Copper contact plugs with barrier layers Ching-Hua Hsieh, Huang-Ming Chen, Hsueh Wen Tsau 2020-06-30
10534273 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Yung-Hsu Wu 2020-01-14
9935006 Trench liner for removing impurities in a non-copper trench Hsien-Chang Wu 2018-04-03
9721894 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Ming-Han Lee, Shau-Lin Shue 2017-08-01
9614052 Copper contact plugs with barrier layers Ching-Hua Hsieh, Huang-Ming Chen, Hsueh Wen Tsau 2017-04-04
9589897 Trench liner for removing impurities in a non-copper trench Hsien-Chang Wu 2017-03-07
9530737 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Ming-Han Lee, Shau-Lin Shue 2016-12-27
9136206 Copper contact plugs with barrier layers Ching-Hua Hsieh, Huang-Ming Chen, Hsueh Wen Tsau 2015-09-15
8252690 In situ Cu seed layer formation for improving sidewall coverage Cheng-Lin Huang, Shing-Chyang Pan, Ching-Hua Hsieh 2012-08-28
8034709 Method for forming composite barrier layer Cheng-Lin Huang, Ching-Hua Hsieh, Hsien-Ming Lee, Shing-Chyang Pan, Chao-Hsien Peng +3 more 2011-10-11
7704886 Multi-step Cu seed layer formation for improving sidewall coverage Shing-Chyang Pan, Cheng-Lin Huang, Ching-Hua Hsieh 2010-04-27
7453149 Composite barrier layer Cheng-Lin Huang, Ching-Hua Hsieh, Hsien-Ming Lee, Shing-Chyang Pan, Chao-Hsien Peng +3 more 2008-11-18
7253501 High performance metallization cap layer Hsien-Ming Lee, Jing-Cheng Lin, Shing-Chyang Pan, Ching-Hua Hsieh, Chao-Hsien Peng +2 more 2007-08-07