SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 151–175 of 365 patents

Patent #TitleCo-InventorsDate
10312139 Interconnect structure having an etch stop layer over conductive lines Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2019-06-04
10269915 Vertical MOS transistor and fabricating method thereof Tai-I Yang, Yung-Chih Wang, Shin-Yi Yang, Chih Wei Lu, Hsin-Ping Chen 2019-04-23
10269706 Semiconductor device and manufacturing method thereof Ming-Han Lee 2019-04-23
10269634 Semiconductor device having voids and method of forming same Yung-Hsu Wu, Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao 2019-04-23
10170306 Method of double patterning lithography process using plurality of mandrels for integrated circuit applications Chung-Ju Lee, Hsin-Chieh Yao, Tien-I Bao, Yung-Hsu Wu 2019-01-01
10164018 Semiconductor interconnect structure having graphene-capped metal interconnects Shin-Yi Yang, Ching-Fu Yeh, Ming-Han Lee 2018-12-25
10163786 Method of forming metal interconnection Shin-Yi Yang, Ming-Han Lee, Tz-Jun Kuo 2018-12-25
10163753 Method for forming interconnect structure of semiconductor device Ming-Han Lee 2018-12-25
10163654 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2018-12-25
10121698 Method of manufacturing a semiconductor device Hsiang-Huan Lee, Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more 2018-11-06
10049919 Semiconductor device including a target integrated circuit pattern Chieh-Han Wu, Cheng-Hsiung Tsai, Chung-Ju Lee, Ming-Feng Shieh, Ru-Gun Liu +1 more 2018-08-14
10014175 Lithography using high selectivity spacers for pitch reduction Yu-Sheng Chang, Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Hsiang-Huan Lee +5 more 2018-07-03
10000373 Nano-electromechanical system (NEMS) device structure and method for forming the same Hsin-Ping Chen, Carlos H. Diaz, Ken-Ichi Goto, Tai-I Yang 2018-06-19
9997440 Protection layer for adhesive material at wafer edge Wen-Chih Chiou, Weng-Jin Wu 2018-06-12
9997404 Method of forming an interconnect structure for a semiconductor device Yung-Hsu Wu, Cheng-Hsiung Tsai, Yu-Sheng Chang, Chia-Tien Wu, Chung-Ju Lee +4 more 2018-06-12
9978708 Wafer backside interconnect structure connected to TSVs Ming-Fa Chen, Wen-Chih Chiou 2018-05-22
9972529 Method of forming metal interconnection Shin-Yi Yang, Ming-Han Lee, Tz-Jun Kuo 2018-05-15
9922927 Method and apparatus for forming self-aligned via with selectively deposited etching stop layer Yung-Hsu Wu, Hai-Ching Chen, Jung-Hsun Tsai, Tien-I Bao 2018-03-20
9911646 Self-aligned double spacer patterning process Cheng-Hsiung Tsai, Yung-Hsu Wu, Tsung-Min Huang, Chung-Ju Lee, Tien-I Bao 2018-03-06
9911623 Via connection to a partially filled trench Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee +1 more 2018-03-06
9892933 Lithography using multilayer spacer for reduced spacer footing Chao-Hsien Peng, Hsiang-Huan Lee 2018-02-13
9837310 Method of manufacturing a semiconductor device Chao-Hsien Peng, Chi-Liang Kuo, Hsiang-Huan Lee 2017-12-05
9831117 Self-aligned double spacer patterning process Yung-Hsu Wu, Tsung-Min Huang, Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2017-11-28
9818644 Interconnect structure and manufacturing method thereof Shin-Yi Yang, Hsi-Wen Tien, Ming-Han Lee, Hsiang-Huan Lee 2017-11-14
9799558 Method for forming conductive structure in semiconductor structure Hsi-Wen Tien, Carlos H. Diaz, Chung-Ju Lee, Tien-I Bao 2017-10-24