SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 126–150 of 365 patents

Patent #TitleCo-InventorsDate
11081447 Graphene-assisted low-resistance interconnect structures and methods of formation thereof Shin-Yi Yang, Yu-Chen Chan, Ming-Han Lee, Hai-Ching Chen 2021-08-03
11075113 Metal capping layer and methods thereof Shao-Kuan Lee, Cheng-Chin Lee, Hsin-Yen Huang, Hai-Ching Chen 2021-07-27
11069526 Using a self-assembly layer to facilitate selective formation of an etching stop layer Shao-Kuan Lee, Hsin-Yen Huang, Yung-Hsu Wu, Cheng-Chin Lee, Hai-Ching Chen 2021-07-20
11011421 Semiconductor device having voids and method of forming same Yung-Hsu Wu, Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao 2021-05-18
11004740 Structure and method for interconnection with self-alignment Tai-I Yang, Yu-Chieh Liao, Chia-Tien Wu, Hsin-Ping Chen, Hai-Ching Chen 2021-05-11
10991618 Semiconductor device and method of manufacture Tai-I Yang, Wei-Chen Chu, Yung-Chih Wang, Chia-Tien Wu, Hsin-Ping Chen 2021-04-27
10930551 Methods for fabricating a low-resistance interconnect Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hsiang-Wei Liu, Tai-I Yang +2 more 2021-02-23
10879115 Semiconductor device and forming method thereof Ming-Han Lee, Shih-Kang Fu, Meng-Pei Lu 2020-12-29
10867850 Selective deposition method for forming semiconductor structure Cheng-Chin Lee, Shao-Kuan Lee, Hsin-Yen Huang, Hai-Ching Chen 2020-12-15
10867913 Method and apparatus for forming self-aligned via with selectively deposited etching stop layer Yung-Hsu Wu, Hai-Ching Chen, Jung-Hsun Tsai, Tien-I Bao 2020-12-15
10861742 Interconnect structure having an etch stop layer over conductive lines Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2020-12-08
10818509 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2020-10-27
10784160 Semiconductor device having voids and method of forming same Yung-Hsu Wu, Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao 2020-09-22
10763211 Semiconductor device and manufacturing method thereof Ming-Han Lee 2020-09-01
10714424 Method of forming metal interconnection Shin-Yi Yang, Ming-Han Lee, Tz-Jun Kuo 2020-07-14
10676351 Nano-electromechanical system (NEMS) device structure and method for forming the same Hsin-Ping Chen, Carlos H. Diaz, Ken-Ichi Goto, Tai-I Yang 2020-06-09
10665467 Spacer etching process for integrated circuit design Ru-Gun Liu, Cheng-Hsiung Tsai, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee +6 more 2020-05-26
10651279 Semiconductor interconnect structure having graphene-capped metal interconnects Shin-Yi Yang, Ching-Fu Yeh, Ming-Han Lee 2020-05-12
10622453 Vertical MOS transistor Tai-I Yang, Yung-Chih Wang, Shin-Yi Yang, Chih Wei Lu, Hsin-Ping Chen 2020-04-14
10535559 Semiconductor interconnect structure having a graphene barrier layer Shin-Yi Yang, Ming-Han Lee 2020-01-14
10534273 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Li-Lin Su, Yung-Hsu Wu 2020-01-14
10515823 Via connection to a partially filled trench Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee +1 more 2019-12-24
10510657 Semiconductor device with interconnecting structure and method for manufacturing the same Shin-Yi Yang, Ming-Han Lee 2019-12-17
10490497 Selective formation of conductor nanowires Chao-Hsien Peng, Hsiang-Huan Lee 2019-11-26
10319632 Semiconductor interconnect structure having a graphene barrier layer Shin-Yi Yang, Ming-Han Lee 2019-06-11