SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 101–125 of 365 patents

Patent #TitleCo-InventorsDate
11422475 Multi-metal fill with self-aligned patterning and dielectric with voids Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Li-Lin Su, Yung-Hsu Wu 2022-08-23
11404366 Hybrid interconnect structure for self aligned via Shin-Yi Yang, Ming-Han Lee 2022-08-02
11387113 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2022-07-12
11361994 Fully self-aligned interconnect structure Hsin-Ping Chen, Min Cao 2022-06-14
11361989 Method for manufacturing interconnect structures including air gaps Cheng-Chin Lee, Shao-Kuan Lee, Hsin-Yen Huang, Hai-Ching Chen 2022-06-14
11355430 Capping layer overlying dielectric structure to increase reliability Ting-Ya Lo, Chi-Lin Teng, Hai-Ching Chen, Hsin-Yen Huang, Shao-Kuan Lee +1 more 2022-06-07
11355390 Interconnect strucutre with protective etch-stop Shao-Kuan Lee, Hai-Ching Chen, Hsin-Yen Huang, Cheng-Chin Lee 2022-06-07
11335596 Selective deposition for integrated circuit interconnect structures Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hai-Ching Chen 2022-05-17
11322395 Dielectric capping structure overlying a conductive structure to increase stability Hsin-Yen Huang, Chi-Lin Teng, Hai-Ching Chen, Shao-Kuan Lee, Cheng-Chin Lee +1 more 2022-05-03
11309241 Protection liner on interconnect wire to enlarge processing window for overlying interconnect via Shin-Yi Yang, Hsin-Yen Huang, Ming-Han Lee, Yu-Chen Chan, Meng-Pei Lu 2022-04-19
11296026 Semiconductor device and manufacturing method thereof Ming-Han Lee 2022-04-05
11251073 Selective deposition of barrier layer Hsin-Yen Huang, Hai-Ching Chen 2022-02-15
11227833 Interconnect structure and method for forming the same Shao-Kuan Lee, Cheng-Chin Lee, Hsin-Yen Huang, Hai-Ching Chen 2022-01-18
11222843 Interconnect structure and method for forming the same Hsin-Yen Huang, Shao-Kuan Lee, Cheng-Chin Lee, Hai-Ching Chen 2022-01-11
11211256 Method with CMP for metal ion prevention Shih-Kang Fu, Ming-Han Lee 2021-12-28
11205618 Graphene barrier layer Shin-Yi Yang, Ming-Han Lee 2021-12-21
11201106 Semiconductor device with conductors embedded in a substrate Hsin-Ping Chen, Ming-Han Lee 2021-12-14
11189560 Semiconductor device comprising etch stop layer over dielectric layer and method of manufacture Shao-Kuan Lee, Hai-Ching Chen, Hsin-Yen Huang, Cheng-Chin Lee 2021-11-30
11167984 Nano-electromechanical system (NEMS) device structure and method for forming the same Hsin-Ping Chen, Carlos H. Diaz, Ken-Ichi Goto, Tai-I Yang 2021-11-09
11152255 Methods of performing chemical-mechanical polishing process in semiconductor devices Shih-Kang Fu, Ming-Han Lee 2021-10-19
11127680 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee 2021-09-21
11114374 Graphene enabled selective barrier layer formation Shin-Yi Yang, Guanyu Luo, Chin-Lung Chung, Ming-Han Lee 2021-09-07
11094631 Graphene layer for reduced contact resistance Shin-Yi Yang, Ming-Han Lee 2021-08-17
11094626 Methods of forming interconnect structures in semiconductor fabrication Ming-Han Lee 2021-08-17
11087994 Via connection to a partially filled trench Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee +1 more 2021-08-10