SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 226–250 of 365 patents

Patent #TitleCo-InventorsDate
9129906 Self-aligned double spacer patterning process Yung-Hsu Wu, Tsung-Min Huang, Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2015-09-08
9123776 Self-aligned double spacer patterning process Cheng-Hsiung Tsai, Yung-Hsu Wu, Tsung-Min Huang, Chung-Ju Lee, Tien-I Bao 2015-09-01
9095995 Method of forming multiple patterning spacer structures Chih Wei Lu, Chung-Ju Lee 2015-08-04
9040417 Semiconductor devices and methods of manufacture thereof Hsin-Chieh Yao, Chung-Ju Lee, Tien-I Bao 2015-05-26
9030013 Interconnect structures comprising flexible buffer layers Chao-Hsien Peng, Hsin-Yen Huang, Hsiang-Huan Lee 2015-05-12
8941239 Copper interconnect structure and method for forming the same Chen-Hua Yu, Hsiang-Huan Lee, Ching-Fu Yeh 2015-01-27
8916469 Method of fabricating copper damascene Chao-Hsien Peng, Chi-Liang Kuo, Hsiang-Huan Lee 2014-12-23
8912041 Method for forming recess-free interconnect structure Chao-Hsien Peng, Hsiang-Huan Lee 2014-12-16
8889544 Dielectric protection layer as a chemical-mechanical polishing stop layer Yung-Hsu Wu, Hsin-Hsien Lu, Tien-I Bao 2014-11-18
8841773 Multi-layer interconnect structure for stacked dies Hung-Pin Chang, Chien-Ming Chiu, Tsang-Jiuh Wu, Chen-Hua Yu 2014-09-23
8836127 Interconnect with flexible dielectric layer Ching-Yu Lo, Bo-Jiun Lin, Hai-Ching Chen, Tien-I Bao, Chen-Hua Yu 2014-09-16
8791011 Through-silicon via structure formation process Yung-Chi Lin, Weng-Jin Wu 2014-07-29
8791528 Methods of manufacturing metal-silicide features Chen-Tung Lin, Chih-Wei Chang, Chii-Ming Wu, Mei-Yun Wang, Chaing-Ming Chuang 2014-07-29
8791549 Wafer backside interconnect structure connected to TSVs Ming-Fa Chen, Wen-Chih Chiou 2014-07-29
8723275 Semiconductor device with metal silicides having different phases Wei-Jung Lin, Cheng-Tung Lin, Chih-Wei Chang 2014-05-13
8647925 Surface modification for handling wafer thinning process Wen-Chih Chiou, Weng-Jin Wu, Ju-Pin Hung 2014-02-11
8629058 Methods for via structure with improved reliability Cheng-Lin Huang, Ching-Hua Hsieh 2014-01-14
8624396 Apparatus and method for low contact resistance carbon nanotube interconnect Hsien-Chang Wu, Hsiang-Huan Lee 2014-01-07
8466059 Multi-layer interconnect structure for stacked dies Hung-Pin Chang, Chien-Ming Chiu, Tsang-Jiuh Wu, Chen-Hua Yu 2013-06-18
8441136 Protection layer for adhesive material at wafer edge Wen-Chih Chiou, Weng-Jin Wu 2013-05-14
8410607 Semiconductor memory structures Chao-An Jong 2013-04-02
8405201 Through-silicon via structure Yung-Chi Lin, Weng-Jin Wu 2013-03-26
8348719 Polisher for chemical mechanical planarization Hsin-Hsien Lu, Liang-Guang Chen, Tien-I Bao 2013-01-08
8349730 Transitional interface between metal and dielectric in interconnect structures Chien-Hsueh Shih 2013-01-08
8277619 Apparatus for electrochemical plating semiconductor wafers Chung-Liang Chang 2012-10-02