SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 276–300 of 365 patents

Patent #TitleCo-InventorsDate
7432559 Silicide formation on SiGe Jerry Lai, Chii-Ming Wu, Chih-Wei Chang 2008-10-07
7423347 In-situ deposition for cu hillock suppression Chung-Hsien Chen, Chun-Chieh Lin, Minghsing Tsai 2008-09-09
7405151 Method for forming a semiconductor device Gin Jei Wang, Chao-Hsien Peng, Chii-Ming Wu, Chih-Wei Chang 2008-07-29
7396767 Semiconductor structure including silicide regions and method of making same Chii-Ming Wu, Cheng-Tung Lin, Mei-Yun Wang, Chih-Wei Chang 2008-07-08
7354856 Method for forming dual damascene structures with tapered via portions and improved performance Ming-Shih Yeh, Ming-Hsing Tsai, Chen-Hua Yu 2008-04-08
7338903 Sequential reducing plasma and inert plasma pre-treatment method for oxidizable conductor layer Chao-Hsien Peng, Jing-Cheng Lin, Ching-Hua Hsieh 2008-03-04
7312531 Semiconductor device and fabrication method thereof Hui-Lin Chang, Yung-Cheng Lu, Chung-Chi Ko, Pi-Tsung Chen, Chien-Hsueh Shih +2 more 2007-12-25
7282450 Sidewall coverage for copper damascene filling Mei-Yun Wang, Chen-Hua Yu 2007-10-16
7268065 Methods of manufacturing metal-silicide features Chen-Tung Lin, Chih-Wei Chang, Chii-Ming Wu, Mei-Yun Wang, Chiang-Ming Chuang 2007-09-11
7265038 Method for forming a multi-layer seed layer for improved Cu ECP Ping-Kun Wu, Horng-Huei Tseng, Chine-Gie Lo, Chao-Hsiung Wang 2007-09-04
7259463 Damascene interconnect structure with cap layer Jui Jen Huang, Minghsing Tsai, Hung-Wen Su, Ting-Chu Ko 2007-08-21
7256137 Method of forming contact plug on silicide structure Chii-Ming Wu, Chih-Wei Chang, Ju-Wang Hsu, Ming-Huan Tsai 2007-08-14
7253501 High performance metallization cap layer Hsien-Ming Lee, Jing-Cheng Lin, Shing-Chyang Pan, Ching-Hua Hsieh, Chao-Hsien Peng +2 more 2007-08-07
7250683 Method to solve via poisoning for porous low-k dielectric Ming-Hsing Tsai, Jing-Cheng Lin, Chen-Hua Yu 2007-07-31
7247915 Cobalt/nickel bi-layer silicide process for very narrow line polysilicon gate technology Chih-Wei Chang, Mei-Yun Wang, Mong-Song Liang 2007-07-24
7235482 Method of manufacturing a contact interconnection layer containing a metal and nitrogen by atomic layer deposition for deep sub-micron semiconductor technology Chii-Ming Wu, Ming-Hsing Tsai, Ching-Hua Hsieh 2007-06-26
7226860 Method and apparatus for fabricating metal layer Hsien-Ming Lee, Jing-Cheng Lin, Shing-Chyang Pan, Ming-Hsing Tsai, Hung-Wen Su +3 more 2007-06-05
7215024 Barrier-less integration with copper alloy Jing-Cheng Lin, Cheng-Lin Huang, Ching-Hua Hsieh, Mong-Song Liang 2007-05-08
7205234 Method of forming metal silicide Chii-Ming Wu, Mei-Yun Wang, Chih-Wei Chang 2007-04-17
7202162 Atomic layer deposition tantalum nitride layer to improve adhesion between a copper structure and overlying materials Jing-Cheng Lin, Chao-Hsien Peng, Mong-Song Liang 2007-04-10
7193327 Barrier structure for semiconductor devices Chen-Hua Yu, Shing-Chyang Pan, Ching-Hua Hsieh, Cheng-Lin Huang, Hsien-Ming Lee +1 more 2007-03-20
7179759 Barrier layer and fabrication method thereof Cheng-Lin Huang, Ching-Hua Hsieh 2007-02-20
7105439 Cobalt/nickel bi-layer silicide process for very narrow line polysilicon gate technology Chih-Wei Chang, Mei-Yun Wang, Mong-Song Liang 2006-09-12
7091600 Prevention of post CMP defects in CU/FSG process Chung-Shi Liu 2006-08-15
7078810 Semiconductor device and fabrication method thereof Gin Jie Wang, Chao-Hsien Peng, Chii-Ming Wu, Chih-Wei Chang 2006-07-18