SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 301–325 of 365 patents

Patent #TitleCo-InventorsDate
7071095 Barrier metal re-distribution process for resistivity reduction Cheng-Lin Huang, Ching-Hua Hsieh 2006-07-04
7030023 Method for simultaneous degas and baking in copper damascene process Shing-Chyang Pan, Ching-Hua Hsieh, Jing-Cheng Lin, Hsien-Ming Lee, Cheng-Lin Huang 2006-04-18
7015126 Method of forming silicided gate structure Chii-Ming Wu, Cheng-Tung Lin, Mei-Yun Wang, Chih-Wei Chang 2006-03-21
6995471 Self-passivated copper interconnect structure Mong-Song Liang 2006-02-07
6967155 Adhesion of copper and etch stop layer for copper alloy Jing-Cheng Lin, Ching-Hua Hsieh, Mong-Song Liang 2005-11-22
6949472 Method for high kinetic energy plasma barrier deposition Cheng-Lin Huang, Ching-Hua Hsieh 2005-09-27
6884736 Method of forming contact plug on silicide structure Chii-Ming Wu, Mei-Yun Wang, Chih-Wei Chang, Chin-Hwa Hsieh, Chu-Yun Fu +3 more 2005-04-26
6878615 Method to solve via poisoning for porous low-k dielectric Ming-Hsing Tsai, Jing-Cheng Lin, Chen-Hua Yu 2005-04-12
6864143 Eliminate bridging between gate and source/drain in cobalt salicidation Mei-Yun Wang 2005-03-08
6849543 Cobalt silicide formation method employing wet chemical silicon substrate oxidation Mei-Yun Wang, Chih-Wei Chang, Ching-Hau Hsieh 2005-02-01
6825520 Capacitor with a roughened silicide layer Cheng-Yeh Shih 2004-11-30
6815336 Planarization of copper damascene using reverse current electroplating and chemical mechanical polishing Syun-Ming Jang 2004-11-09
6806192 Method of barrier-less integration with copper alloy Jing-Cheng Lin, Cheng-Lin Huang, Ching-Hua Hsieh, Mong-Song Liang 2004-10-19
6797144 Method for reducing surface defects in an electrodeposition process Hung-Wen Su, Shih-Wei Chou, Ching-Hua Hsieh 2004-09-28
6759750 Method for integrating low-K materials in semiconductor fabrication Ming-Hsing Tsai 2004-07-06
6737352 Method of preventing particle generation in plasma cleaning Chung-Shi Liu, Chen-Hua Ya 2004-05-18
6736701 Eliminate broken line damage of copper after CMP Ying-Ho Chen, Wen-Chih Chiou, Tsu Shih, Syun-Ming Jang 2004-05-18
6723639 Prevention of post CMP defects in Cu/FSG process Chung-Shi Liu 2004-04-20
6716753 Method for forming a self-passivated copper interconnect structure Mong-Song Liang 2004-04-06
6686280 Sidewall coverage for copper damascene filling Mei-Yun Wang, Chen-Hua Yu 2004-02-03
6620725 Reduction of Cu line damage by two-step CMP Ming-Hsing Tsai, Wen-Jye Tsai, Ying-Ho Chen, Tsu Shih, Jih-Churng Twu +1 more 2003-09-16
6610592 Method for integrating low-K materials in semiconductor fabrication Ming-Hsin Tsai 2003-08-26
6576543 Method for selectively depositing diffusion barriers Jing-Cheng Lin 2003-06-10
6562725 Dual damascene structure employing nitrogenated silicon carbide and non-nitrogenated silicon carbide etch stop layers Ming-Hsing Tsai, Ching-Hua Hsieh, Chen-Hua Yu 2003-05-13
6551915 Thermal annealing/hydrogen containing plasma method for forming structurally stable low contact resistance damascene conductor structure Jing-Cheng Lin 2003-04-22