SS

Shau-Lin Shue

TSMC: 365 patents #21 of 12,232Top 1%
Overall (All Time): #796 of 4,157,543Top 1%
365
Patents All Time

Issued Patents All Time

Showing 351–365 of 365 patents

Patent #TitleCo-InventorsDate
6211075 Method of improving metal stack reliability Chung-Shi Liu, Chen-Hua Yu, Hung-Ju Chien 2001-04-03
6207568 Ionized metal plasma (IMP) method for forming (111) oriented aluminum containing conductor layer Chung-Shi Liu, Chen-Hua Yu 2001-03-27
6197701 Lightly nitridation surface for preparing thin-gate oxides Jih-Churng Twu 2001-03-06
6177347 In-situ cleaning process for Cu metallization Chung-Shi Liu, Chen-Hua Yu 2001-01-23
6143617 Composite capacitor electrode for a DRAM cell Cheng-Yeh Shih 2000-11-07
6140241 Multi-step electrochemical copper deposition process with improved filling capability Ming-Hsing Tsai, Wen-Jye Tsai, Chen-Hua Yu 2000-10-31
6133144 Self aligned dual damascene process and structure with low parasitic capacitance Ming-Hsing Tsai 2000-10-17
6110817 Method for improvement of electromigration of copper by carbon doping Ming Wsing Tsai 2000-08-29
6099701 AlCu electromigration (EM) resistance Chung-Shi Liu, Chen-Hua Yu 2000-08-08
6096651 Key-hole reduction during tungsten plug formation Mei-Yun Wang, Chen-Hua Yu 2000-08-01
6083835 Self-passivation of copper damascene Chen-Hua Yu 2000-07-04
6080657 Method of reducing AlCu hillocks Chung-Shi Liu, Chen-Hua Yu 2000-06-27
6015735 Method for forming a multi-anchor DRAM capacitor and capacitor formed Hun-Jan Tao, Chia-Shiung Tsai, Jenn Ming Huang 2000-01-18
5962346 Fluorine-doped silicate glass hard mask to improve metal line etching profile Chia-Shiung Tsai 1999-10-05
5744395 Low resistance, self-aligned, titanium silicide structures, using a single rapid thermal anneal procedure Chen-Hua Yu 1998-04-28