Issued Patents All Time
Showing 151–175 of 351 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274847 | Humidity control in EUV lithography | An-Ren Zi, Ching-Yu Chang, Joy Cheng | 2019-04-30 |
| 10269628 | FinFET low resistivity contact formation method | Sung-Li Wang, Ding-Kang Shih, Sey-Ping Sun, Clement Hsingjen Wann | 2019-04-23 |
| 10164114 | FinFETs and methods of forming FinFETs | Tai-Chun Huang, Tien-I Bao | 2018-12-25 |
| 10163632 | Material composition and process for substrate modification | Wei-Han Lai, Chien-Wei Wang, Ching-Yu Chang | 2018-12-25 |
| 10163648 | Method of semiconductor device fabrication having application of material with cross-linkable component | Wei-Han Lai, Ching-Yu Chang | 2018-12-25 |
| 10162258 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Yao-Ching Ku +3 more | 2018-12-25 |
| 10161965 | Method of test probe alignment control | Jui-Long Chen, Chien-Chih Liao, Hui-Yun Chao, Jong-I Mou, Tseng Chin Lo +1 more | 2018-12-25 |
| 10115597 | Self-aligned dual-metal silicide and germanide formation | Chun Hsiung Tsai, Chi-Yuan Shih, Gin-Chen Huang, Clement Hsingjen Wann, Li-Chi Yu +6 more | 2018-10-30 |
| 10115592 | Patterning process with silicon mask layer | Chen-Yu Liu, Ching-Yu Chang | 2018-10-30 |
| 10115585 | Hardmask composition and methods thereof | Chen-Yu Liu, Ching-Yu Chang | 2018-10-30 |
| 10083832 | Under layer composition and method of manufacturing semiconductor device | Chen-Yu Liu, Ching-Yu Chang, Ming-Hui Weng | 2018-09-25 |
| 10073347 | Semiconductor method of protecting wafer from bevel contamination | An-Ren Zi, Joy Cheng, Ching-Yu Chang | 2018-09-11 |
| 10049918 | Directional patterning methods | Chi-Cheng Hung, Ru-Gun Liu, Wei-Liang Lin, Ta-Ching Yu, Yung-Sung Yen +3 more | 2018-08-14 |
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2018-08-14 |
| 10042252 | Extreme ultraviolet photoresist and method | Yen-Hao Chen, Wei-Han Lai, Chien-Wei Wang | 2018-08-07 |
| 9985134 | FinFETs and methods of forming FinFETs | Tai-Chun Huang, Tien-I Bao | 2018-05-29 |
| 9978594 | Formation method of semiconductor device structure using patterning stacks | Li-Yen Lin, Ching-Yu Chang, Kuei-Shun Chen | 2018-05-22 |
| 9976215 | Semiconductor film formation apparatus and process | You-Hua Chou, Chih-Tsung Lee, Shu-Fen Wu | 2018-05-22 |
| 9958424 | Method of identifying airborne molecular contamination source | Tzu-Sou Chuang, Jeng-Jyi Hwang, Cheng-Lung Chou, Chi-Ming Yang | 2018-05-01 |
| 9927707 | Developer for lithography | Chen-Yu Liu, Ching-Yu Chang | 2018-03-27 |
| 9899496 | Method of making a finFET device | Sey-Ping Sun, Sung-Li Wang, Neng-Kuo Chen, Clement Hsingjen Wann | 2018-02-20 |
| 9892954 | Wafer processing system using multi-zone chuck | Nai-Han Cheng, Chi-Ming Yang, You-Hua Chou, Kuo-Sheng Chuang | 2018-02-13 |
| 9887071 | Multi-zone EPD detectors | Chien-An Chen, Yen-Shuo Su, Ying Xiao | 2018-02-06 |
| 9865429 | Ion implantation with charge and direction control | Chih-Hong Hwang, Chun-Lin Chang, Nai-Han Cheng, Chi-Ming Yang | 2018-01-09 |
| 9863754 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Heng-Hsin Liu, Jui-Chun Peng, Ho Ping Cheng | 2018-01-09 |