Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9976215 | Semiconductor film formation apparatus and process | You-Hua Chou, Chih-Tsung Lee, Chin-Hsiang Lin | 2018-05-22 |
| 9287154 | UV curing system for semiconductors | Ming Huei Lien, Chia-Ho Chen, Chih-Tsung Lee, You-Hua Chou | 2016-03-15 |
| 9218998 | Electrostatic chuck with multi-zone control | Chia-Ho Chen, Ming Huei Lien, Chih-Tsung Lee, You-Hua Chou | 2015-12-22 |
| 8902561 | Electrostatic chuck with multi-zone control | Chia-Ho Chen, Ming Huei Lien, Chih-Tsung Lee, You-Hua Chou | 2014-12-02 |