Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287154 | UV curing system for semiconductors | Chia-Ho Chen, Shu-Fen Wu, Chih-Tsung Lee, You-Hua Chou | 2016-03-15 |
| 9218998 | Electrostatic chuck with multi-zone control | Chia-Ho Chen, Shu-Fen Wu, Chih-Tsung Lee, You-Hua Chou | 2015-12-22 |
| 8902561 | Electrostatic chuck with multi-zone control | Chia-Ho Chen, Shu-Fen Wu, Chih-Tsung Lee, You-Hua Chou | 2014-12-02 |
| 8796105 | Method and apparatus for preparing polysilazane on a semiconductor wafer | You-Hua Chou, Chih-Tsung Lee, Min Hao Hong, Chih-Jen Wu, Chen-Ming Huang | 2014-08-05 |