Issued Patents All Time
Showing 51–75 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075701 | Processes for reconditioning multi-component electrodes | Armen Avoyan, Yan Fang, Duane Outka, Stephen Whitten | 2011-12-13 |
| 8075703 | Immersive oxidation and etching process for cleaning silicon electrodes | Armen Avoyan, Duane Outka, Catherine Zhou | 2011-12-13 |
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Armen Avoyan, John Daugherty | 2011-09-20 |
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Qian Fu, Tuochuan Huang, Raphael Casaes, Duane Outka | 2011-07-12 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Yaobo Yin, Jason Augustino, Catherine Zhou, Armen Avoyan | 2011-05-17 |
| 7833401 | Electroplating an yttrium-containing coating on a chamber component | Nianci Han, Li Xu, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2010-11-16 |
| 7811409 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Michael Kang, Anthony Chen, Jack Kuo, Duane Outka +1 more | 2010-10-12 |
| 7638004 | Method for cleaning microwave applicator tube | Harmeet Singh, Raphael Casaes, Duane Outka, Mohammad Kamarehi | 2009-12-29 |
| 7578889 | Methodology for cleaning of surface metal contamination from electrode assemblies | Yaobo Yin, Shun Wu, Armen Avoyan, John Daugherty, Linda (Tong) Jiang | 2009-08-25 |
| 7507670 | Silicon electrode assembly surface decontamination by acidic solution | Tuochuan Huang, Chunhong Zhou | 2009-03-24 |
| 7498269 | Cleaning methods for silicon electrode assembly surface contamination removal | Daxing Ren | 2009-03-03 |
| 7442114 | Methods for silicon electrode assembly etch rate and etch uniformity recovery | Tuochuan Huang, Daxing Ren, Catherine Zhou, Chun Yan, Enrico Magni +4 more | 2008-10-28 |
| 7371467 | Process chamber component having electroplated yttrium containing coating | Nianci Han, Li Xu, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2008-05-13 |
| 7270761 | Fluorine free integrated process for etching aluminum including chamber dry clean | Xikun Wang, Hui Chen, Anbei Jiang, Steve S. Y. Mak | 2007-09-18 |
| 7247579 | Cleaning methods for silicon electrode assembly surface contamination removal | Daxing Ren | 2007-07-24 |
| 7052553 | Wet cleaning of electrostatic chucks | Tuochuan Huang, Catherine Zhou, Bruno Morel, Brian McMillin, Paul Mulgrew +1 more | 2006-05-30 |
| 6942929 | Process chamber having component with yttrium-aluminum coating | Nianci Han, Li Xu | 2005-09-13 |
| 6808747 | Coating boron carbide on aluminum | Nianci Han | 2004-10-26 |
| 6649532 | Methods for etching an organic anti-reflective coating | Hui Chen, Xikun Wang, Chun Yan, Wai-Fan Yau | 2003-11-18 |
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Nianci Han, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2003-11-04 |
| 6623595 | Wavy and roughened dome in plasma processing reactor | Nianci Han, Li Xu, Yan Ye | 2003-09-23 |
| 6592707 | Corrosion-resistant protective coating for an apparatus and method for processing a substrate | Nianci Han, Jie Yuan, Joe Sommers, Diana Xiaobing Ma, Paul Vollmer +1 more | 2003-07-15 |
| 6508911 | Diamond coated parts in a plasma reactor | Nianci Han, Jennifer Y. Sun, Li Xu | 2003-01-21 |
| 6466881 | Method for monitoring the quality of a protective coating in a reactor chamber | Joe Sommers, Diana Xiaobing Ma | 2002-10-15 |
| 6413389 | Method for recovering metal from etch by-products | Danny Lu, Nianci Han, Li Xu, Diana Xiaobing Ma | 2002-07-02 |