Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9054148 | Method for performing hot water seal on electrostatic chuck | Tuochuan Huang, David Schaefer, Ambarish Chhatre, John Daugherty, MingHang Wu +1 more | 2015-06-09 |
| 9012030 | Process chamber component having yttrium—aluminum coating | Nianci Han, Li Xu | 2015-04-21 |
| 9006490 | Method for direct functionalization of polyaniline and other molecules having diiminoquinoid ring via C-C bond formation | Chien-Chung Han | 2015-04-14 |
| 8945317 | System and method for cleaning gas injectors | Armen Avoyan, Cliff La Croix, Allan K. Ronne, John Daugherty, Catherine Zhou | 2015-02-03 |
| 8859432 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Michael Kang, Anthony Chen, Jack Kuo, Duane Outka +1 more | 2014-10-14 |
| 8854451 | Automated bubble detection apparatus and method | Josh Cormier, Fangli Hao, Tuochuan Huang, John Daugherty, Allan K. Ronne +1 more | 2014-10-07 |
| 8679252 | Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof | G. Grant Peng, Daxing Ren | 2014-03-25 |
| 8585844 | Extending lifetime of yttrium oxide as a plasma chamber material | Duane Outka, Shenjian Liu, John Daugherty | 2013-11-19 |
| 8580079 | Electrode carrier assemblies | Cliff La Croix, Armen Avoyan, Duane Outka, Catherine Zhou | 2013-11-12 |
| 8550880 | Platen and adapter assemblies for facilitating silicon electrode polishing | Armen Avoyan, Duane Outka, Catherine Zhou | 2013-10-08 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | John Daugherty, Dean J. Larson, Tuochuan Huang, Armen Avoyan, Jeremy Chang +5 more | 2013-10-01 |
| 8444456 | Electrode securing platens and electrode polishing assemblies incorporating the same | Cliff La Croix, Armen Avoyan, Duane Outka, Catherine Zhou | 2013-05-21 |
| 8313635 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Michael Kang, Anthony Chen, Jack Kuo, Duane Outka +1 more | 2012-11-20 |
| 8292698 | On-line chamber cleaning using dry ice blasting | Oana M. Leonte, John Daugherty, Tuochuan Huang, Gregory J. Goldspring, Michael C. May | 2012-10-23 |
| 8291565 | Method of refurbishing bipolar electrostatic chuck | — | 2012-10-23 |
| 8276604 | Peripherally engaging electrode carriers and assemblies incorporating the same | Jason Augustino, Armen Avoyan, Yan Fang, Duane Outka, Stephen Whitten | 2012-10-02 |
| 8276898 | Electrode transporter and fixture sets incorporating the same | Armen Avoyan, Duane Outka | 2012-10-02 |
| 8221552 | Cleaning of bonded silicon electrodes | Duane Outka, Jason Augustino, Armen Avoyan, Stephen Whitten, Yan Fang | 2012-07-17 |
| 8216388 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Qian Fu, Tuochuan Huang, Raphael Casaes, Duane Outka | 2012-07-10 |
| 8215321 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Yaobo Yin, Jason Augustino, Catherine Zhou, Armen Avoyan | 2012-07-10 |
| 8171877 | Backside mounted electrode carriers and assemblies incorporating the same | Jason Augustino, Armen Avoyan, Yan Fang, Duane Outka, Stephen Whitten | 2012-05-08 |
| 8143904 | System and method for testing an electrostatic chuck | Saurabh Ullal, Tuochuan Huang, Yan Fang, Jon McChesney | 2012-03-27 |
| 8114525 | Process chamber component having electroplated yttrium containing coating | Nianci Han, Li Xu, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2012-02-14 |
| 8110086 | Method of manufacturing a process chamber component having yttrium-aluminum coating | Nianci Han, Li Xu | 2012-02-07 |
| 8097105 | Extending lifetime of yttrium oxide as a plasma chamber material | Duane Outka, Shenjian Liu, John Daugherty | 2012-01-17 |