Issued Patents All Time
Showing 76–82 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352081 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Danny Lu, Allen Zhao, Peter Hsieh, Li Xu, Yan Ye | 2002-03-05 |
| 6352611 | Ceramic composition for an apparatus and method for processing a substrate | Nianci Han, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2002-03-05 |
| 6123791 | Ceramic composition for an apparatus and method for processing a substrate | Nianci Han, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2000-09-26 |
| 6120640 | Boron carbide parts and coatings in a plasma reactor | Nianci Han, Steve S. Y. Mak, Gerald Yin | 2000-09-19 |
| 5493904 | Apparatus for measuring a coating on a plate | Manuel Sarkis Mekhjian | 1996-02-27 |
| 5373734 | Method and apparatus for determining the quality of a coating | Manuel Sarkis Mekhjian | 1994-12-20 |
| 5194138 | Method for creating a corrosion-resistant aluminum surface | Florian B. Mansfeld, You Wang | 1993-03-16 |