Issued Patents All Time
Showing 51–75 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9209017 | Advanced ultra low k SiCOH dielectrics prepared by built-in engineered pore size and bonding structured with cyclic organosilicon precursors | Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha | 2015-12-08 |
| 9087796 | Semiconductor fabrication method using stop layer | Thomas N. Adam, Kangguo Cheng, Ali Khakifirooz, Alexander Reznicek, Raghavasimhan Sreenivasan +1 more | 2015-07-21 |
| 8815475 | Reticle carrier | Kevin S. Petrarca, Mahadevaiyer Krishnan, Rebecca D. Mih, Steven E. Steen, Henry Grabarz +1 more | 2014-08-26 |
| 8439728 | Reticle carrier | Kevin S. Petrarca, Mahadevaiyer Krishnan, Rebecca D. Mih, Steven E. Steen, Henry Grabarz +1 more | 2013-05-14 |
| 8110321 | Method of manufacture of damascene reticle | Kevin S. Petrarca, Mahadevaiyer Krishnan, Rebecca D. Mih, Steven E. Steen, Henry Grabarz +1 more | 2012-02-07 |
| 7407605 | Manufacturable CoWP metal cap process for copper interconnects | Darryl D. Restaino, Judith M. Rubino, Sean Smith, Richard O. Henry, James E. Fluegel +1 more | 2008-08-05 |
| 7253106 | Manufacturable CoWP metal cap process for copper interconnects | Darryl D. Restaino, Judith M. Rubino, Sean Smith, Richard O. Henry, James E. Fluegel +1 more | 2007-08-07 |
| 7199450 | Materials and method to seal vias in silicon substrates | Jon A. Casey, Michael Berger, Leena Paivikki Buchwalter, Raymond R. Horton, Anurag Jain +2 more | 2007-04-03 |
| 7045453 | Very low effective dielectric constant interconnect structures and methods for fabricating the same | Timothy J. Dalton, Stephen M. Gates, Mahadevaiyer Krishnan, Satya V. Nitta, Sampath Purushothaman +1 more | 2006-05-16 |
| 7023093 | Very low effective dielectric constant interconnect Structures and methods for fabricating the same | Timothy J. Dalton, Stephen M. Gates, Mahadevaiyer Krishnan, Satya V. Nitta, Sampath Purushothaman +1 more | 2006-04-04 |
| 6825075 | Method of fabricating MIM capacitor with the encapsulated metal structure serving as the lower plate | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2004-11-30 |
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Michael A. Cobb, William J. Cote, Kenneth M. Davis, Scott A. Estes +9 more | 2004-11-02 |
| 6762667 | Micro electromechanical switch having self-aligned spacers | Richard P. Volant, David Angell, Joseph T. Kocis, Kevin S. Petrarca, Kenneth J. Stein +1 more | 2004-07-13 |
| 6756624 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2004-06-29 |
| 6621392 | Micro electromechanical switch having self-aligned spacers | Richard P. Volant, David Angell, Joseph T. Kocis, Kevin S. Petrarca, Kenneth J. Stein +1 more | 2003-09-16 |
| 6597068 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2003-07-22 |
| 6524935 | Preparation of strained Si/SiGe on insulator by hydrogen induced layer transfer technique | Jack O. Chu, Christopher P. D'Emic, Lijuan Huang, John A. Ott, Hon-Sum Philip Wong | 2003-02-25 |
| 6475072 | Method of wafer smoothing for bonding using chemo-mechanical polishing (CMP) | Jack O. Chu, Guy M. Cohen, Lijuan Huang, John A. Ott, Michael F. Lofaro | 2002-11-05 |
| 6368953 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2002-04-09 |
| 6361402 | Method for planarizing photoresist | Rangarajan Jagannathan, Mahadevaiyer Krishnan, Max G. Levy, Uma Satyendra, Matthew Sendelbach +2 more | 2002-03-26 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | William J. Cote, Paul M. Feeney, Mahadevaiyer Krishnan, Joyce C. Liu, Michael F. Lofaro +2 more | 2002-02-19 |
| 6114249 | Chemical mechanical polishing of multiple material substrates and slurry having improved selectivity | Rangarajan Jagannathan, Mahadevaiyer Krishnan, Clifford Owen Morgan, III, Terrance M. Wright | 2000-09-05 |
| 5635253 | Method of replenishing electroless gold plating baths | Rangarajan Jagannathan, Mahadevaiyer Krishnan | 1997-06-03 |
| 5576099 | Inductive head lamination with layer of magnetic quenching material | Mahadevaiyer Krishnan, Sol Krongelb, David L. Rath, Lubomyr T. Romakiw | 1996-11-19 |
| 5516416 | Apparatus and method for electroplating pin grid array packaging modules | Kim H. Ruffing | 1996-05-14 |