Issued Patents All Time
Showing 51–75 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745802 | Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder | Mitsuru Koizumi | 2010-06-29 |
| 7746453 | Pattern defect inspection apparatus and method | Kei Shimura, Sachio Uto, Minori Noguchi | 2010-06-29 |
| 7692779 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2010-04-06 |
| 7643138 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Kenji Oka, Takanori Ninomiya +4 more | 2010-01-05 |
| 7639350 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2009-12-29 |
| 7620232 | Method and apparatus for pattern inspection | Kaoru Sakai, Shunji Maeda | 2009-11-17 |
| 7601954 | Method and apparatus for reviewing defects | Toshifumi Honda, Sachio Uto | 2009-10-13 |
| 7586593 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2009-09-08 |
| 7586594 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2009-09-08 |
| 7526747 | Inspection method and inspection system using charged particle beam | Mari Nozoe, Hiroyuki Shinada | 2009-04-28 |
| 7521679 | Inspection method and inspection system using charged particle beam | Mari Nozoe | 2009-04-21 |
| 7511806 | Apparatus and method for inspecting defects | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ooshima, Tetsuya Watanabe | 2009-03-31 |
| 7508973 | Method of inspecting defects | Takafumi Okabe, Shunji Maeda, Yukihiro Shibata | 2009-03-24 |
| 7499157 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Minori Noguchi, Tetsuya Watanabe, Takuaki Sekiguchi | 2009-03-03 |
| 7463350 | Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal | Minoru Yoshida, Yukihiro Shibata, Shunji Maeda | 2008-12-09 |
| 7462828 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Mitsugu Sato, Naomasa Suzuki, Muneyuki Fukuda, Noritsugu Takahashi | 2008-12-09 |
| 7449690 | Inspection method and inspection apparatus using charged particle beam | Muneyuki Fukuda, Noritsugu Takahashi, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki | 2008-11-11 |
| 7443496 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2008-10-28 |
| 7417723 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Kenji Oka, Takanori Ninomiya +4 more | 2008-08-26 |
| 7417721 | Defect detector and defect detecting method | Sachio Uto, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2008-08-26 |
| 7411207 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2008-08-12 |
| 7400393 | Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen | Yukihiro Shibata, Shunji Maeda | 2008-07-15 |
| 7383039 | Radio communication system having ID management apparatus, operation management apparatus and line controller | Tadashi Nakamura, Koichi Kawahata | 2008-06-03 |
| 7359044 | Method and apparatus for inspecting pattern defects | Yukihiro Shibata, Shunji Maeda, Minoru Yoshida | 2008-04-15 |
| 7333192 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Yuta Urano +1 more | 2008-02-19 |