Issued Patents All Time
Showing 26–50 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8218138 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Yuta Urano +1 more | 2012-07-10 |
| 8158937 | Particle beam system | Mitsuru Koizumi | 2012-04-17 |
| 8153969 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Mitsugu Sato, Naomasa Suzuki, Muneyuki Fukuda, Noritsugu Takahashi | 2012-04-10 |
| 8119994 | Apparatus and method for inspecting sample | Mitsuru Koizumi | 2012-02-21 |
| 8094295 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2012-01-10 |
| 8093557 | Method and apparatus for reviewing defects | Toshifumi Honda, Sachio Uto | 2012-01-10 |
| 8072597 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2011-12-06 |
| 8051322 | Redundant failover system, redundancy managing apparatus and application processing apparatus | Norihisa Matsumoto, Nodoka MIMURA, Makoto Watanabe | 2011-11-01 |
| 8045148 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Minori Noguchi, Tetsuya Watanabe, Takuaki Sekiguchi | 2011-10-25 |
| 8045146 | Method and apparatus for reviewing defect | Keiya Saito, Yasuhiro Yoshitake, Shunichi Matsumoto | 2011-10-25 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Kenji Oka, Takanori Ninomiya +4 more | 2011-10-18 |
| 8030622 | Specimen holder, specimen inspection apparatus, and specimen inspection method | Mitsuru Koizumi, Mitsuo Suga | 2011-10-04 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2011-09-06 |
| 7973920 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Yuta Urano +1 more | 2011-07-05 |
| 7968843 | Method and apparatus for simultaneous SEM and optical examination | — | 2011-06-28 |
| 7940383 | Method of detecting defects on an object | Minori Noguchi, Yoshimasa Ohshima, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2011-05-10 |
| 7928380 | Sample holder, method for observation and inspection, and apparatus for observation and inspection | Mitsuo Suga | 2011-04-19 |
| 7923700 | Sample inspection apparatus, sample inspection method and sample inspection system | — | 2011-04-12 |
| 7906760 | Inspection method and reagent solution | Mitsuo Suga, Mitsuru Koizumi | 2011-03-15 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2011-03-08 |
| 7876113 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Mitsuo Suga, Yoichiro Neo | 2011-01-25 |
| 7848563 | Method and apparatus for inspecting a defect of a pattern | Kaoru Sakai, Shunji Maeda, Hisae Shibuya | 2010-12-07 |
| 7768634 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2010-08-03 |
| 7768635 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Yuta Urano +1 more | 2010-08-03 |
| 7745802 | Specimen holder, specimen inspection apparatus, specimen inspection method, and method of fabricating specimen holder | Mitsuru Koizumi | 2010-06-29 |