Issued Patents All Time
Showing 76–100 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7332359 | Semiconductor device inspection method | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima | 2008-02-19 |
| 7315366 | Apparatus and method for inspecting defects | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ooshima, Tetsuya Watanabe | 2008-01-01 |
| 7315363 | Inspection method and inspection apparatus | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2008-01-01 |
| 7295305 | Method and its apparatus for inspecting a pattern | Minoru Yoshida, Shunji Maeda | 2007-11-13 |
| 7276693 | Inspection method and apparatus using charged particle beam | Hikaru Koyama, Mari Nozoe | 2007-10-02 |
| 7262425 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-28 |
| 7256412 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-14 |
| 7248352 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2007-07-24 |
| 7211797 | Inspection method and inspection system using charged particle beam | Mari Nozoe | 2007-05-01 |
| 7205549 | Pattern defect inspection method and its apparatus | Minoru Yoshida, Shunji Maeda, Masahiro Watanabe | 2007-04-17 |
| 7196785 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Minori Noguchi, Tetsuya Watanabe, Takuaki Sekiguchi | 2007-03-27 |
| 7187438 | Apparatus and method for inspecting defects | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ooshima, Tetsuya Watanabe | 2007-03-06 |
| 7177020 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yukio Kembo, Kazuhiko Matsuoka +1 more | 2007-02-13 |
| 7115892 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2006-10-03 |
| 7112791 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Shigeaki Hijikata, Kenji Watanabe, Koji Abe | 2006-09-26 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2006-08-29 |
| 7061602 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Kenji Oka, Takanori Ninomiya +4 more | 2006-06-13 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2006-05-02 |
| 7019294 | Inspection method and apparatus using charged particle beam | Hikaru Koyama, Mari Nozoe | 2006-03-28 |
| 6998630 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2006-02-14 |
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2005-08-30 |
| 6931620 | Inspection method and inspection system using charged particle beam | Mari Nozoe, Hiroyuki Shinada | 2005-08-16 |
| 6924482 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Mitsuo Suga, Yoichiro Neo | 2005-08-02 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yukio Kembo, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Kenji Oka, Takanori Ninomiya +4 more | 2005-05-03 |