Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10746668 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Hoite Pieter Theodoor Tolsma, Peter Ten Berge +5 more | 2020-08-18 |
| 10725372 | Method and apparatus for reticle optimization | Wim Tjibbo Tel, Marinus Jochemsen, Frank Staals, Christopher PRENTICE, Laurent Michel Marcel Depre +3 more | 2020-07-28 |
| 10691863 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen | 2020-06-23 |
| 10495990 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Jasper Menger, Paul Cornelius Hubertus Aben | 2019-12-03 |
| 10317191 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Hoite Pieter Theodoor Tolsma, Peter Ten Berge +5 more | 2019-06-11 |
| 10061212 | Metrology target, method and apparatus, target design method, computer program and lithographic system | Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Youping Zhang | 2018-08-28 |
| 9971478 | Method and apparatus for inspection and metrology | Erik Mathijs Maria Crombag, Ajith Ganesan | 2018-05-15 |
| 9811006 | Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program | Jochem Sebastiaan Wildenberg | 2017-11-07 |
| 9632430 | Lithographic system, lithographic method and device manufacturing method | Maurits Van Der Schaar, Scott Anderson Middlebrooks | 2017-04-25 |
| 9594029 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Hoite Pieter Theodoor Tolsma, Peter Ten Berge +5 more | 2017-03-14 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Andreas Fuchs, Martyn John Coogans, Hendrik Jan Hidde Smilde | 2016-01-12 |
| 8982347 | Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus | Xiuhong Wei, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof, Hubertus Johannes Gertrudus Simons +4 more | 2015-03-17 |
| 8972031 | Control method and apparatus | Birgitt Noëlle Cornelia Liduine Hepp, Jasper Menger | 2015-03-03 |
| 8887107 | Inspection method and apparatus and lithographic processing cell | Hubertus Johannes Gertrudus Simons, Peter Ten Berge, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben | 2014-11-11 |
| 8796684 | Lithographic method and arrangement | Nicole Schoumans, Birgitt Noëlle Cornelia Liduine Hepp, Remco Jochem Sebastiaan Groenendijk | 2014-08-05 |
| 8706442 | Alignment system, lithographic system and method | Henricus Johannes Lambertus Megens, Maurits Van Der Schaar, Hubertus Johannes Gertrudus Simons, Scott Anderson Middlebrooks | 2014-04-22 |
| 8612045 | Optimization method and a lithographic cell | Mircea Dusa, Jozef Maria Finders, Christianus Gerardus Maria De Mol, Scott Anderson Middlebrooks, Dongzi Wangli | 2013-12-17 |
| 8504333 | Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method | Hubertus Johannes Gertrudus Simons, Scott Anderson Middlebrooks | 2013-08-06 |
| 8497976 | Substrate measurement method and apparatus | Wilhelmus Maria Corbeij, Arie Jeffrey Den Boef | 2013-07-30 |
| 8264664 | Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method | Maurits Van Der Schaar, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Rene Monshouwer | 2012-09-11 |
| 8264686 | Lithographic apparatus and device manufacturing method using overlay measurement | Arie Jeffrey Den Boef, Maurits Van Der Schaar, Stefan Carolus Jacobus Antonius Keij | 2012-09-11 |
| 8248579 | Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns | Maurits Van Der Schaar, Hubertus Johannes Gertrudus Simons | 2012-08-21 |
| 8237914 | Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patterns | Maurits Van Der Schaar, Hubertus Johannes Gertrudus Simons | 2012-08-07 |
| 8111398 | Method of measurement, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2012-02-07 |
| 8064056 | Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2011-11-22 |