Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969577 | Inspection apparatus, an apparatus for projecting an image and a method of measuring a property of a substrate | Roy Werkman, Maurits Van Der Schaar | 2011-06-28 |
| 7898662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2011-03-01 |
| 7894063 | Lithographic method | Franciscus Bernardus Maria Van Bilsen | 2011-02-22 |
| 7821650 | Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren | 2010-10-26 |
| 7724370 | Method of inspection, a method of manufacturing, an inspection apparatus, a substrate, a mask, a lithography apparatus and a lithographic cell | Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2010-05-25 |
| 7710572 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Maurits Van Der Schaar, Thomas Leo Maria Hoogenboom | 2010-05-04 |
| 7683351 | Lithographic apparatus and device manufacturing method | Maurits Van Der Schaar, Hubertus Johannes Gertrudus Simons | 2010-03-23 |
| 7619737 | Method of measurement, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar | 2009-11-17 |
| 7599064 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods | Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2009-10-06 |
| 7573584 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2009-08-11 |
| 7564555 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Mircea Dusa, Maurits Van Der Schaar, Stefan Carolus Jacobus Antonius Keij | 2009-07-21 |
| 7550379 | Alignment mark, use of a hard mask material, and method | Richard Johannes Franciscus Van Haren | 2009-06-23 |
| 7547495 | Device manufacturing method and computer program product | Leonardus Henricus Marie Verstappen | 2009-06-16 |
| 7532305 | Lithographic apparatus and device manufacturing method using overlay measurement | Arie Jeffrey Den Boef, Maurits Van Der Schaar, Stefan Carolus Jacobus Antonius Keij | 2009-05-12 |
| 7486408 | Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren | 2009-02-03 |
| 7476490 | Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method | Maurits Van Der Schaar, Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Rene Monshouwer | 2009-01-13 |
| 7468795 | Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same | Hubertus Johannes Gertrudus Simons, Henricus Johannes Lambertus Megens, Leonardus Henricus Marie Verstappen, Roy Werkman, Henricus Jacobus Maria Verhoeven | 2008-12-23 |
| 7415319 | Lithographic apparatus and device manufacturing method | Roy Werkman | 2008-08-19 |
| 7391513 | Lithographic apparatus and device manufacturing method using overlay measurement quality indication | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2008-06-24 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren +7 more | 2006-09-26 |
| 7030961 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Arie Jeffrey Den Boef, Maurits Van Der Schaar | 2006-04-18 |
| 6987556 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Maurits Van Der Schaar, Irwan Dani Setija | 2006-01-17 |
| 6879868 | Alignment system for lithographic apparatus for measuring a position of an alignment mark | Maurits Van Der Schaar | 2005-04-12 |
| 6732004 | Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby | Maurits Van Der Schaar | 2004-05-04 |
| 6704089 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Maurits Van Der Schaar, Irwan Dani Setija | 2004-03-09 |