Issued Patents All Time
Showing 51–75 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10040168 | Stepped retaining ring | Shaun Van Der Veen | 2018-08-07 |
| 9937601 | Retaining ring with Shaped Surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2018-04-10 |
| 9873179 | Carrier for small pad for chemical mechanical polishing | Hui Chen, Hung Chih Chen, Eric Lau, Garrett H. Sin, Shou-Sung Chang | 2018-01-23 |
| 9844800 | Systems, methods and apparatus for post-chemical mechanical planarization substrate cleaning | Brian J. Brown | 2017-12-19 |
| 9751189 | Compliant polishing pad and polishing module | Chih-Hung Chen, Jay Gurusamy | 2017-09-05 |
| 9694470 | Stepped retaining ring | Shaun Van Der Veen | 2017-07-04 |
| 9610672 | Configurable pressure design for multizone chemical mechanical planarization polishing head | Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2017-04-04 |
| 9452505 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Thomas Brezoczky | 2016-09-27 |
| 9368371 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2016-06-14 |
| 9352441 | Chemical mechanical polisher with hub arms mounted | Chih-Hung Chen, Jay Gurusamy | 2016-05-31 |
| 9186773 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2015-11-17 |
| 9056383 | Path for probe of spectrographic metrology system | Jeffrey Drue David, Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld +4 more | 2015-06-16 |
| 8921686 | Back-contact photovoltaic cell comprising a thin lamina having a superstrate receiver element | Christopher J. Petti, Gopal Prabhu | 2014-12-30 |
| 8808062 | Multi-chamber carrier head with a textured membrane | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Thomas Brezoczky | 2014-08-19 |
| 8771460 | Retaining ring for chemical mechanical polishing | Thomas H. Osterheld | 2014-07-08 |
| 8628378 | Method for holding and polishing a substrate | Hung Chih Chen | 2014-01-14 |
| 8585468 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2013-11-19 |
| 8545660 | Bonding apparatus and method | Robert D. Tolles, Derek Aqui, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero | 2013-10-01 |
| 8486220 | Method of assembly of retaining ring for CMP | Thomas H. Osterheld | 2013-07-16 |
| 8470125 | Multilayer retaining ring for chemical mechanical polishing | Thomas H. Osterheld | 2013-06-25 |
| 8469776 | Flexible membrane for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2013-06-25 |
| 8465345 | Stepped retaining ring | Shaun Van Der Veen | 2013-06-18 |
| 8454413 | Multi-chamber carrier head with a textured membrane | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Thomas Brezoczky | 2013-06-04 |
| 8360409 | Apparatus and method for simultaneous treatment of multiple workpieces | Derek Aqui, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal | 2013-01-29 |
| 8334191 | Two-chamber system and method for serial bonding and exfoliation of multiple workpieces | Derek Aqui, Andrew J. Nagengast, Kirk Liebscher, John Alexander, Keenan Leon Guerrero | 2012-12-18 |