| 11780046 |
Polishing system with annular platen or polishing pad |
Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Fred C. Redeker |
2023-10-10 |
| 11759911 |
Carrier head with segmented substrate chuck |
Jay Gurusamy |
2023-09-19 |
| 11749552 |
Wafer processing tools and methods thereof |
Jagan Rangarajan, Edward Golubovsky, Shaun Van Der Veen, Justin Ho Kuen Wong |
2023-09-05 |
| 11745227 |
Substrate cleaning devices and methods thereof |
Jay Gurusamy, Jagan Rangarajan |
2023-09-05 |
| 11724357 |
Pivotable substrate retaining ring |
Jay Gurusamy, Andrew J. Nagengast |
2023-08-15 |
| 11721563 |
Non-contact clean module |
Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Ekaterina A. Mikhaylichenko +2 more |
2023-08-08 |
| 11717936 |
Methods for a web-based CMP system |
Dmitry Sklyar, Jeonghoon Oh, Gerald Alonzo, Jonathan P. Domin, Jay Gurusamy |
2023-08-08 |
| 11682561 |
Retaining ring having inner surfaces with facets |
Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate |
2023-06-20 |
| 11660721 |
Dual loading retaining ring |
Andrew J. Nagengast |
2023-05-30 |
| 11623321 |
Polishing head retaining ring tilting moment control |
Andrew J. Nagengast, Jay Gurusamy |
2023-04-11 |
| 11577361 |
Retaining ring with shaped surface and method of forming |
Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more |
2023-02-14 |
| 11511390 |
Pivotable substrate retaining ring |
Jay Gurusamy, Andrew J. Nagengast |
2022-11-29 |
| 11511388 |
Polishing system with support post and annular platen or polishing pad |
Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Fred C. Redeker |
2022-11-29 |
| 11453099 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2022-09-27 |
| 11400560 |
Retaining ring design |
Jeonghoon Oh, Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Edwin C. Suarez +2 more |
2022-08-02 |
| 11389925 |
Offset head-spindle for chemical mechanical polishing |
Jay Gurusamy, Bum Jick Kim, Danielle Loi |
2022-07-19 |
| 11344991 |
Retainer for chemical mechanical polishing carrier head |
Andrew J. Nagengast |
2022-05-31 |
| 11325223 |
Carrier head with segmented substrate chuck |
Jay Gurusamy |
2022-05-10 |
| 11289347 |
Non-contact clean module |
Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Ekaterina A. Mikhaylichenko +2 more |
2022-03-29 |
| 11260500 |
Retaining ring with shaped surface |
Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more |
2022-03-01 |
| 11056350 |
Retaining ring having inner surfaces with facets |
Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate |
2021-07-06 |
| 10766117 |
Retaining ring with shaped surface |
Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more |
2020-09-08 |
| 10702971 |
Textured membrane for a multi-chamber carrier head |
Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Thomas Brezoczky |
2020-07-07 |
| 10562147 |
Polishing system with annular platen or polishing pad for substrate monitoring |
Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Fred C. Redeker |
2020-02-18 |
| 10500695 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2019-12-10 |
