Issued Patents All Time
Showing 76–100 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8298047 | Substrate retainer | Hung Chih Chen | 2012-10-30 |
| 8207047 | Apparatus and method for simultaneous treatment of multiple workpieces | Derek Aqui, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal | 2012-06-26 |
| 8173473 | Laser system for processing solar wafers in a carrier | Derek Aqui, Venkateswaran Subbaraman, Kirk Liebscher, John Alexander, Zhenhua Zhang +1 more | 2012-05-08 |
| 8151852 | Bonding apparatus and method | Robert D. Tolles, Derek Aqui, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero | 2012-04-10 |
| 8088299 | Multiple zone carrier head with flexible membrane | Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky | 2012-01-03 |
| 8066551 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-11-29 |
| 8029640 | Multilayer retaining ring for chemical mechanical polishing | Thomas H. Osterheld | 2011-10-04 |
| 8021215 | Carrier head with retaining ring and carrier ring | Andrew J. Nagengast, Jeonghoon Oh | 2011-09-20 |
| 7950985 | Flexible membrane for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2011-05-31 |
| 7927190 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-04-19 |
| 7901273 | Carrier ring for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2011-03-08 |
| 7883397 | Substrate retainer | Hung Chih Chen | 2011-02-08 |
| 7842158 | Multiple zone carrier head with flexible membrane | Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky | 2010-11-30 |
| 7815495 | Pad conditioner | Kun Xu, Jimin Zhang, James C. Wang, Thomas H. Osterheld, Yutao Ma +1 more | 2010-10-19 |
| 7789736 | Stepped retaining ring | Shaun Van Der Veen | 2010-09-07 |
| 7727055 | Flexible membrane for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2010-06-01 |
| 7699688 | Carrier ring for carrier head | Andrew J. Nagengast, Jeonghoon Oh | 2010-04-20 |
| 7654888 | Carrier head with retaining ring and carrier ring | Andrew J. Nagengast, Jeonghoon Oh | 2010-02-02 |
| 7601050 | Polishing apparatus with grooved subpad | Peter McReynolds, Erik S. Rondum, Benjamin A. Bonner, Henry H. Au, Gregory E. Menk +3 more | 2009-10-13 |
| 7597608 | Pad conditioning device with flexible media mount | Shou-Sung Chang | 2009-10-06 |
| 7575504 | Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly | Andrew J. Nagengast, Jeonghoon Oh | 2009-08-18 |
| 7534364 | Methods for a multilayer retaining ring | Thomas H. Osterheld | 2009-05-19 |
| 7527271 | Fast substrate loading on polishing head without membrane inflation step | Jeonghoon Oh, Andrew J. Nagengast, Hung Chih Chen | 2009-05-05 |
| 7520955 | Carrier head with a multilayer retaining ring for chemical mechanical polishing | Thomas H. Osterheld | 2009-04-21 |
| 7497767 | Vibration damping during chemical mechanical polishing | Hung Chih Chen, Shijian Li, John M. White, Ramin Emami, Fred C. Redeker +1 more | 2009-03-03 |