Issued Patents All Time
Showing 101–125 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7459057 | Substrate retainer | Hung Chih Chen | 2008-12-02 |
| 7344434 | Retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Stacy Meyer, Trung T. Doan +5 more | 2008-03-18 |
| 7273408 | Paired pivot arm | Hung Chih Chen | 2007-09-25 |
| 7255771 | Multiple zone carrier head with flexible membrane | Hung Chih Chen, Jeonghoon Oh, Tsz-Sin Siu, Thomas Brezoczky | 2007-08-14 |
| 7207871 | Carrier head with multiple chambers | Hung Chih Chen, Thomas Brezoczky, Steven T. Mear | 2007-04-24 |
| 7198561 | Flexible membrane for multi-chamber carrier head | Hung Chih Chen, Jeonghoon Oh | 2007-04-03 |
| 7153188 | Temperature control in a chemical mechanical polishing system | Hung Chih Chen, Stan Tsai, Kapila Wijekoon, Fred C. Redeker, Rajeev Bajaj | 2006-12-26 |
| 7115024 | Profile control platen | Hung Chih Chen, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2006-10-03 |
| 7101272 | Carrier head for thermal drift compensation | Hung Chih Chen | 2006-09-05 |
| 7101273 | Carrier head with gimbal mechanism | Ming-Kuei Tseng | 2006-09-05 |
| 7081042 | Substrate removal from polishing tool | Hung Chih Chen, Tsz-Sin Siu | 2006-07-25 |
| 7048621 | Retaining ring deflection control | Hung Chih Chen | 2006-05-23 |
| 7040971 | Carrier head with a flexible membrane | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2006-05-09 |
| 7018275 | Closed-loop control of wafer polishing in a chemical mechanical polishing system | Manoocher Birang | 2006-03-28 |
| 7001260 | Carrier head with a compressible film | Hung Chih Chen | 2006-02-21 |
| 7001256 | Carrier head with a non-stick membrane | Hung Chih Chen | 2006-02-21 |
| 7001257 | Multi-chamber carrier head with a flexible membrane | Hung Chih Chen | 2006-02-21 |
| 6979250 | Carrier head with flexible membrane to provide controllable pressure and loading area | Hung Chih Chen, Ming Kuie Tseng | 2005-12-27 |
| 6974371 | Two part retaining ring | Hung Chih Chen, Jeonghoon Oh, Robert D. Tolles | 2005-12-13 |
| 6923714 | Carrier head with a non-stick membrane | Hung Chih Chen | 2005-08-02 |
| 6913518 | Profile control platen | Hung Chih Chen, Charles C. Garretson, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6890249 | Carrier head with edge load retaining ring | Ming-Kuei Tseng | 2005-05-10 |
| 6872130 | Carrier head with non-contact retainer | — | 2005-03-29 |
| 6872122 | Apparatus and method of detecting a substrate in a carrier head | — | 2005-03-29 |
| 6857931 | Method of detecting a substrate in a carrier head | Hung Chih Chen, Ming-Kuei Tseng | 2005-02-22 |