Issued Patents All Time
Showing 151–175 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6398621 | Carrier head with a substrate sensor | Ming-Kuei Tseng | 2002-06-04 |
| 6390908 | Determining when to replace a retaining ring used in substrate polishing operations | Hung Chih Chen, Bret W. Adams, Manoocher Birang, Kean Chew | 2002-05-21 |
| 6386955 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2002-05-14 |
| 6368191 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Hung Chih Chen, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2002-04-09 |
| 6361419 | Carrier head with controllable edge pressure | Gopalakrishna B. Prahbu, Steven T. Mear | 2002-03-26 |
| 6361420 | Method of chemical mechanical polishing with edge control | Hung Chih Chen, Gopalakrishna B. Prabhu | 2002-03-26 |
| 6358121 | Carrier head with a flexible membrane and an edge load ring | — | 2002-03-19 |
| 6277009 | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus | Hung Chih Chen | 2001-08-21 |
| 6277014 | Carrier head with a flexible membrane for chemical mechanical polishing | Hung Chih Chen | 2001-08-21 |
| 6251215 | Carrier head with a multilayer retaining ring for chemical mechanical polishing | Thomas H. Osterheld, Lawrence Rosenberg | 2001-06-26 |
| 6244942 | Carrier head with a flexible membrane and adjustable edge pressure | — | 2001-06-12 |
| 6244932 | Method for detecting the presence of a substrate in a carrier head | Boris Govzman, Hung Chih Chen | 2001-06-12 |
| 6241593 | Carrier head with pressurizable bladder | Hung Chih Chen, Frank Bose | 2001-06-05 |
| 6217426 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Hung Chih Chen | 2001-04-17 |
| 6210255 | Carrier head for chemical mechanical polishing a substrate | Hung Chih Chen | 2001-04-03 |
| 6183354 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2001-02-06 |
| 6165058 | Carrier head for chemical mechanical polishing | Hung Chih Chen | 2000-12-26 |
| 6162116 | Carrier head for chemical mechanical polishing | Hung Chih Chen | 2000-12-19 |
| 6159079 | Carrier head for chemical mechanical polishing a substrate | Hung Chih Chen, Manoocher Birang | 2000-12-12 |
| 6146259 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Hung Chih Chen, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2000-11-14 |
| 6132298 | Carrier head with edge control for chemical mechanical polishing | Hung Chih Chen, Gopalakrishna B. Prabhu | 2000-10-17 |
| 6080050 | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus | Hung Chih Chen | 2000-06-27 |
| 5993302 | Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus | Hung Chih Chen | 1999-11-30 |
| 5957751 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Hung Chih Chen, Sasson Somekh | 1999-09-28 |
| 5762544 | Carrier head design for a chemical mechanical polishing apparatus | Stephen J. Blumenkranz | 1998-06-09 |