Issued Patents All Time
Showing 126–150 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6857946 | Carrier head with a flexure | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2005-02-22 |
| 6857945 | Multi-chamber carrier head with a flexible membrane | Hung Chih Chen | 2005-02-22 |
| 6848980 | Vibration damping in a carrier head | Hung Chih Chen, Ramakrishna Cheboli | 2005-02-01 |
| 6835125 | Retainer with a wear surface for chemical mechanical polishing | Ming-Kuei Tseng, Michael W. Richter | 2004-12-28 |
| 6776692 | Closed-loop control of wafer polishing in a chemical mechanical polishing system | Manoocher Birang | 2004-08-17 |
| 6776694 | Methods for carrier head with multi-part flexible membrane | Hung Chih Chen, Ming Kuie Tseng | 2004-08-17 |
| 6722965 | Carrier head with flexible membranes to provide controllable pressure and loading area | Hung Chih Chen, Ming Kuie Tseng | 2004-04-20 |
| 6705932 | Carrier head for chemical mechanical polishing | Hung Chih Chen | 2004-03-16 |
| 6663466 | Carrier head with a substrate detector | Hung Chih Chen, Ming-Kuei Tseng | 2003-12-16 |
| 6645044 | Method of chemical mechanical polishing with controllable pressure and loading area | — | 2003-11-11 |
| 6602114 | Multilayer retaining ring for chemical mechanical polishing | Junshi Wang | 2003-08-05 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Hung Chih Chen | 2003-06-10 |
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Manoocher Birang, Robert D. Tolles, Charles C. Garretson | 2003-06-03 |
| 6547641 | Carrier head with a substrate sensor | Ming-Kuei Tseng | 2003-04-15 |
| 6540594 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Manoocher Birang, Hung Chih Chen, Sen-Hou Ko | 2003-04-01 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Hung Chih Chen, Sasson Somekh | 2003-02-11 |
| 6514124 | Carrier head for chemical mechanical polishing a substrate | Hung Chih Chen, Manoocher Birang | 2003-02-04 |
| 6511367 | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Hung Chih Chen, Manoocher Birang, Kapila Wijekoon, Sen-Hou Ko | 2003-01-28 |
| 6494774 | Carrier head with pressure transfer mechanism | Hung Chih Chen | 2002-12-17 |
| 6450868 | Carrier head with multi-part flexible membrane | Hung Chih Chen, Ming Kuie Tseng | 2002-09-17 |
| 6436228 | Substrate retainer | Hung Chih Chen | 2002-08-20 |
| 6436828 | Chemical mechanical polishing using magnetic force | Hung Chih Chen | 2002-08-20 |
| 6431968 | Carrier head with a compressible film | Hung Chih Chen | 2002-08-13 |
| 6422927 | Carrier head with controllable pressure and loading area for chemical mechanical polishing | — | 2002-07-23 |
| 6406361 | Carrier head for chemical mechanical polishing | Hung Chih Chen | 2002-06-18 |