Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979250 | Carrier head with flexible membrane to provide controllable pressure and loading area | Steven M. Zuniga, Hung Chih Chen | 2005-12-27 |
| 6776694 | Methods for carrier head with multi-part flexible membrane | Steven M. Zuniga, Hung Chih Chen | 2004-08-17 |
| 6722965 | Carrier head with flexible membranes to provide controllable pressure and loading area | Steven M. Zuniga, Hung Chih Chen | 2004-04-20 |
| 6450868 | Carrier head with multi-part flexible membrane | Steven M. Zuniga, Hung Chih Chen | 2002-09-17 |