Issued Patents All Time
Showing 51–75 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5957751 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Steven M. Zuniga, Hung Chih Chen | 1999-09-28 |
| 5897426 | Chemical mechanical polishing with multiple polishing pads | — | 1999-04-27 |
| 5882165 | Multiple chamber integrated process system | Dan Maydan, David N. Wang, David Cheng, Masato Toshima, Isaac Harari +1 more | 1999-03-16 |
| 5855681 | Ultra high throughput wafer vacuum processing system | Dan Maydan, Ashok Sinha, Kevin Fairbairn, Christopher T. Lane, Kelly Colborne +2 more | 1999-01-05 |
| 5849136 | High frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Hiroji Hanawa, Dan Maydan, Kenneth S. Collins | 1998-12-15 |
| 5822171 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred A. Goldspiel +2 more | 1998-10-13 |
| 5810936 | Plasma-inert cover and plasma cleaning process and apparatus employing same | Cissy Leung, Lawrence Chung-Lai Lei | 1998-09-22 |
| 5804507 | Radially oscillating carousel processing system for chemical mechanical polishing | Ilya Perlov, Eugene Gantvarg, Harry Q. Lee, Robert D. Tolles | 1998-09-08 |
| 5753132 | Method of making electrostatic chuck with conformal insulator film | Shamouil Shamouilian, Hyman J. Levinstein, Manoocher Birang, Semyon Sherstinsky, John F. Cameron | 1998-05-19 |
| 5745331 | Electrostatic chuck with conformal insulator film | Shamouil Shamouilian, Hyman J. Levinstein, Manoocher Birang, Semyon Sherstinsky, John F. Cameron | 1998-04-28 |
| 5738574 | Continuous processing system for chemical mechanical polishing | Robert D. Tolles, Norm Shendon, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 1998-04-14 |
| 5705080 | Plasma-inert cover and plasma cleaning process | Cissy Leung, Lawrence Chung-Lai Lei | 1998-01-06 |
| 5697748 | Wafer tray and ceramic blade for semiconductor processing apparatus | Kevin Fairbairn, Gary M. Kolstoe, Gregory W. White, W. George Faraco, Jr. | 1997-12-16 |
| 5643366 | Wafer handling within a vacuum chamber using vacuum | Philip M. Salzman, Oskar U. Vierny | 1997-07-01 |
| 5636964 | Wafer tray and ceramic blade for semiconductor processing apparatus | Kevin Fairbairn, Gary M. Kolstoe, Gregory W. White, W. George Faraco, Jr. | 1997-06-10 |
| 5618382 | High-frequency semiconductor wafer processing apparatus and method | Donald M. Mintz, Hiroji Hanawa, Dan Maydan, Kenneth S. Collins | 1997-04-08 |
| 5570994 | Wafer tray and ceramic blade for semiconductor processing apparatus | Kevin Fairbairn, Gary M. Kolstoe, Gregory W. White, W. George Faraco, Jr. | 1996-11-05 |
| 5556147 | Wafer tray and ceramic blade for semiconductor processing apparatus | Kevin Fairbairn, Gary M. Kolstoe, Gregory W. White, W. George Faraco, Jr. | 1996-09-17 |
| 5384008 | Process and apparatus for full wafer deposition | Ashok Sinha | 1995-01-24 |
| 5356835 | Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer | Jaim Nulman, Mei Chang | 1994-10-18 |
| 5294320 | Apparatus for cleaning a shield in a physical vapor deposition chamber | Dan Maydan | 1994-03-15 |
| 5292393 | Multichamber integrated process system | Dan Maydan, David N. Wang, David Cheng, Masato Toshima, Isaac Harari +1 more | 1994-03-08 |
| 5280983 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng, Edward M. Abolnikov +5 more | 1994-01-25 |
| 5250467 | Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer | Jaim Nulman, Mei Chang | 1993-10-05 |
| 5224809 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng, Edward M. Abolnikov +5 more | 1993-07-06 |