Issued Patents All Time
Showing 26–50 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6763130 | Real time defect source identification | Amotz Maimon | 2004-07-13 |
| 6729944 | Chemical mechanical polishing apparatus with rotating belt | Manoocher Birang, Lawrence Rosenberg, John M. White | 2004-05-04 |
| 6705924 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | — | 2004-03-16 |
| 6640151 | Multi-tool control system, method and medium | Howard Grunes | 2003-10-28 |
| 6585563 | In-situ monitoring of linear substrate polishing operations | Fred C. Redeker, Manoocher Birang, Shijian Li | 2003-07-01 |
| 6582282 | Chemical mechanical polishing with multiple polishing pads | — | 2003-06-24 |
| 6561884 | Web lift system for chemical mechanical planarization | John M. White, Phillip R. Sommer | 2003-05-13 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Boris Govzman, Steven M. Zuniga, Hung Chih Chen | 2003-02-11 |
| 6435945 | Chemical mechanical polishing with multiple polishing pads | — | 2002-08-20 |
| 6427703 | Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system | — | 2002-08-06 |
| 6394109 | Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system | — | 2002-05-28 |
| 6379231 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Lawrence Rosenberg, John M. White | 2002-04-30 |
| 6381021 | Method and apparatus for measuring reflectivity of deposited films | Manoocher Birang | 2002-04-30 |
| 6352467 | Integrated electrodeposition and chemical mechanical polishing tool | Debabrata Ghosh, Bret W. Adams | 2002-03-05 |
| 6343973 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | — | 2002-02-05 |
| 6291334 | Etch stop layer for dual damascene process | — | 2001-09-18 |
| 6258170 | Vaporization and deposition apparatus | Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin, Vincent Ku +3 more | 2001-07-10 |
| 6244935 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Lawrence Rosenberg, John M. White | 2001-06-12 |
| 6179709 | In-situ monitoring of linear substrate polishing operations | Fred C. Redeker, Manoocher Birang, Shijian Li | 2001-01-30 |
| 6165271 | Temperature controlled process and chamber lid | Jun Zhao, Talex Sajoto, Charles Dornfest, Leonid Selyutin | 2000-12-26 |
| 6126517 | System for chemical mechanical polishing having multiple polishing stations | Robert D. Tolles, Norm Shendon, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2000-10-03 |
| 6110011 | Integrated electrodeposition and chemical-mechanical polishing tool | Debabrata Ghosh, Bret W. Adams | 2000-08-29 |
| 6093082 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | — | 2000-07-25 |
| 6080046 | Underwater wafer storage and wafer picking for chemical mechanical polishing | Norm Shendon, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee, Robert D. Tolles | 2000-06-27 |
| 6023405 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil +2 more | 2000-02-08 |