Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11298794 | Chemical mechanical polishing using time share control | Jimin Zhang, Brian J. Brown, Wei Lu, Priscilla Diep | 2022-04-12 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-08-03 |
| 11075165 | Methods and apparatus for forming dual metal interconnects | Suketu Arun Parikh, Rong Tao, Roey Shaviv, Joung Joo Lee, Seshadri Ganguli +3 more | 2021-07-27 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Stephen Jew, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-04-06 |
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | David Masayuki Ishikawa, Benjamin Cherian, Jeonghoon Oh, Thomas H. Osterheld | 2019-11-19 |
| 10350723 | Overpolishing based on electromagnetic inductive monitoring of trench depth | Shih-Haur Shen, Jimin Zhang, David Maxwell Gage | 2019-07-16 |
| 10256120 | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | Clinton SAKATA, Hui Chen, Jim K. Atkinson, Brian J. Brown, Yufei Chen +1 more | 2019-04-09 |
| D661718 | Network camera | — | 2012-06-12 |
| 7980255 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2011-07-19 |
| 7718009 | Cleaning submicron structures on a semiconductor wafer surface | Steven Verhaverbeke, Roman Gouk, Brian J. Brown, Han-Wen Chen, Ching-Hwa Weng +2 more | 2010-05-18 |
| 7682457 | Frontside structure damage protected megasonics clean | Zhiyong Li, Bo Xie, Wei Lu | 2010-03-23 |
| 7513062 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2009-04-07 |
| 7165565 | Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning | Robert D. Tolles, David Alvarez | 2007-01-23 |
| 7052365 | Semiconductor wafer chemical-mechanical planarization process monitoring and end-point detection method and apparatus | David Dornfeld | 2006-05-30 |
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2005-10-18 |
| 6910942 | Semiconductor wafer chemical-mechanical planarization process monitoring and end-point detection method and apparatus | David Dornfeld | 2005-06-28 |
| 6855043 | Carrier head with a modified flexible membrane | Brian J. Brown, Charles C. Garretson, Benjamin A. Bonner, Thomas H. Osterheld, Fred C. Redeker | 2005-02-15 |
| 6460551 | Megasonic resonator for disk cleaning and method for use thereof | Boris Fishkin, Alexander Lerner, Brian J. Brown | 2002-10-08 |
| 6412499 | Continuous cleaning megasonic tank with reduced duty cycle transducers | Brian J. Brown, Boris Fishkin | 2002-07-02 |
| 6345630 | Method and apparatus for cleaning the edge of a thin disc | Boris Fishkin, Brian J. Brown | 2002-02-12 |
| 6276371 | Method and apparatus for cleaning the edge of a thin disc | Boris Fishkin, Brian J. Brown | 2001-08-21 |
| 6202658 | Method and apparatus for cleaning the edge of a thin disc | Boris Fishkin, Brian J. Brown | 2001-03-20 |
| 6148833 | Continuous cleaning megasonic tank with reduced duty cycle transducers | Brian J. Brown, Boris Fishkin | 2000-11-21 |
| 6119708 | Method and apparatus for cleaning the edge of a thin disc | Boris Fishkin, Brian J. Brown | 2000-09-19 |