Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9222193 | Non-permeable substrate carrier for electroplating | Emmanuel Chua Abas, Diana Xiaobing Ma, Kalyana Bhargava Ganti, Edmundo Anida Divino, Jake Randal G. Ermita +2 more | 2015-12-29 |
| 9087864 | Multipurpose combinatorial vapor phase deposition chamber | Tony P. Chiang, Frank Greer, Martin Romero, James Tsung | 2015-07-21 |
| 8867286 | Repairable multi-layer memory chip stack and method thereof | Ming-Hsueh Wu, Kun Luo, Yee-Wen Chen | 2014-10-21 |
| 8749586 | Method and apparatus for providing folder item information based on touch operation | Jie Zhang, Jingsong Zhang | 2014-06-10 |
| 8317987 | Non-permeable substrate carrier for electroplating | Emmanuel Chua Abas, Diana Xiaobing Ma, Kalyana Bhargava Ganti | 2012-11-27 |
| 8255215 | Method and apparatus for locating speech keyword and speech recognition system | Fengqin Li, Yadong Wu, Qinqtao Yang | 2012-08-28 |
| 8221601 | Maintainable substrate carrier for electroplating | Emmanuel Chua Abas, Edmundo Anida Divino, Jake Randal G. Ermita, Jose Francisco Capulong, Arnold Villamor Castillo +1 more | 2012-07-17 |
| 7947131 | Copper deposition chamber having integrated bevel clean with edge bevel removal detection | Anh N. Nguyen, Manoocher Birang | 2011-05-24 |
| 7779784 | Apparatus and method for plasma assisted deposition | Avgerinos V. Gelatos, Michael Yang, Ming Xi, Mark Hytros | 2010-08-24 |
| 7153787 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Li-Qun Xia +2 more | 2006-12-26 |
| 6998014 | Apparatus and method for plasma assisted deposition | Avgerinos V. Gelatos, Michael Yang, Ming Xi, Mark Hytros | 2006-02-14 |
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Li-Qun Xia +2 more | 2005-09-13 |
| 6902629 | Method for cleaning a process chamber | Yi Zheng, Vinita Singh, Srinivas D. Nemani, Ju-Hyung Lee, Shankar Venkataraman | 2005-06-07 |
| 6793965 | Clog resistant injection valve | Won Bang | 2004-09-21 |
| 6709721 | Purge heater design and process development for the improvement of low k film properties | Juan Carlos Rocha-Alvarez, Ellie Yieh, Shankar Venkataraman | 2004-03-23 |
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Himanshu Pokharna, Shankar Chandran, Srinivas D. Nemani, Francimar Campana, Ellie Yieh +1 more | 2003-07-22 |
| 6591850 | Method and apparatus for fluid flow control | Juan Carlos Rocha-Alvarez, Shankar Venkataraman | 2003-07-15 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Yen-Kun Wang, Mark Fodor, Himanshu Pokharna, Son T. Nguyen, Kelly Fong +1 more | 2003-01-14 |
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Chi-I Lang, Dian Sugiarto, Li-Qun Xia +2 more | 2002-11-26 |
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Karthik Janakiraman, Kelly Fong, Paul Le, Rong Pan, Shankar Venkataraman | 2002-05-14 |
| 6379492 | Corrosion resistant coating | Won Bae Bang, Shankar Venkataraman, Ajay Bhatnagar | 2002-04-30 |
| 6358327 | Method for endpoint detection using throttle valve position | Himanshu Pokharna, West M. Burghardt, Reuban Richmonds | 2002-03-19 |
| 6346481 | Method of reducing pitting of a coated heater | Won Bae Bang | 2002-02-12 |
| 6303501 | Gas mixing apparatus and method | Koji Nakanishi, Aihua Chen | 2001-10-16 |
| 6267820 | Clog resistant injection valve | Won Bae Bang | 2001-07-31 |