Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6261374 | Clog resistant gas delivery system | Won Bae Bang | 2001-07-17 |
| 6235120 | Coating for parts used in semiconductor processing chambers | Won Bae Bang | 2001-05-22 |
| 6110284 | Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber | Henry Ho, Steven Chen | 2000-08-29 |
| 6068703 | Gas mixing apparatus and method | Koji Nakanishi, Aihua Chen | 2000-05-30 |
| 6066836 | High temperature resistive heater for a process chamber | Steven Chen, Henry Ho, Mei Chang, Ming Xi, Chiliang Chen | 2000-05-23 |
| 6024799 | Chemical vapor deposition manifold | Karl A. Littau | 2000-02-15 |
| 5948958 | Method and apparatus for verifying the calibration of semiconductor processing equipment | Won Bae Bang | 1999-09-07 |