Issued Patents All Time
Showing 76–100 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8461030 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Vikram Singh, James P. Buonodono +4 more | 2013-06-11 |
| 8354655 | Method and system for controlling critical dimension and roughness in resist features | Ludovic Godet, Christopher J. Leavitt, Patrick M. Martin | 2013-01-15 |
| 8330125 | Ion beam tuning | Shengwu Chang, Frank Sinclair, Matthew P. McClellan | 2012-12-11 |
| 8263941 | Mass analysis magnet for a ribbon beam | Victor M. Benveniste, James S. Buff, Frank Sinclair | 2012-09-11 |
| 8188445 | Ion source | Ludovic Godet, Timothy J. Miller, Vikram Singh | 2012-05-29 |
| 8143604 | Insulator system for a terminal structure of an ion implantation system | Russell J. Low, Piortr R. Lubicki, D. Jeffrey Lischer, Steve Krause, Eric D. Hermanson | 2012-03-27 |
| 8133804 | Method and system for modifying patterned photoresist using multi-step ion implantation | Ludovic Godet, Patrick M. Martin | 2012-03-13 |
| 8097866 | Apparatus for measuring beam characteristics and a method thereof | Atul Gupta | 2012-01-17 |
| 8049192 | Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter | Neil J. Bassom, Leo V. Klos | 2011-11-01 |
| 7868305 | Technique for ion beam angle spread control | Atul Gupta | 2011-01-11 |
| 7863531 | Techniques for making high voltage connections | Douglas E. May, Kasegn D. Tekletsadik, Eric D. Hermanson, Piotr Lubicki, Russell J. Low +1 more | 2011-01-04 |
| 7820986 | Techniques for controlling a charged particle beam | Piotr Lubicki, Russell J. Low, Anthony Renau | 2010-10-26 |
| 7820985 | High tilt implant angle performance using in-axis tilt | Atul Gupta | 2010-10-26 |
| 7812325 | Implanting with improved uniformity and angle control on tilted wafers | James P. Buonodono, Paul J. Murphy, Anthony Renau | 2010-10-12 |
| RE41214 | Bi mode ion implantation with non-parallel ion beams | Anthony Renau | 2010-04-13 |
| 7683347 | Technique for improving ion implantation throughput and dose uniformity | Atul Gupta, Anthony Renau, Donna L. Smatlak | 2010-03-23 |
| 7663125 | Ion beam current uniformity monitor, ion implanter and related method | William G. Callahan, Morgan Evans, George M. Gammel, Norman E. Hussey, Gregg Norris | 2010-02-16 |
| 7655932 | Techniques for providing ion source feed materials | Christopher R. Hatem, Craig R. Chaney, Eric R. Cobb, Chris Campbell | 2010-02-02 |
| 7642529 | Method of determining angle misalignment in beam line ion implanters | Atul Gupta | 2010-01-05 |
| 7622722 | Ion implantation device with a dual pumping mode and method thereof | Jonathan Gerald England, Christopher R. Hatem, Jay T. Scheuer | 2009-11-24 |
| 7547900 | Techniques for providing a ribbon-shaped gas cluster ion beam | Anthony Renau, Jonathan Gerald England | 2009-06-16 |
| 7547460 | Ion implanter optimizer scan waveform retention and recovery | Antonella Cucchetti, Gregory Gibilaro, Rosario Mollica | 2009-06-16 |
| 7462844 | Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation | Shengwu Chang, Isao Tsunoda, Nobihiro Tokoro, Dennis Rodier, Donna L. Smatlak +2 more | 2008-12-09 |
| 7459704 | Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms | Anthony Renau, Donna L. Smatlak, Kurt Deckerlucke, Paul J. Murphy, Alexander S. Perel +2 more | 2008-12-02 |
| 7459692 | Electron confinement inside magnet of ion implanter | Anthony Renau, Shengwu Chang, James S. Buff | 2008-12-02 |