Issued Patents All Time
Showing 126–130 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6710359 | Methods and apparatus for scanned beam uniformity adjustment in ion implanters | Rosario Mollica | 2004-03-23 |
| 6573518 | Bi mode ion implantation with non-parallel ion beams | Anthony Renau | 2003-06-03 |
| 6437350 | Methods and apparatus for adjusting beam parallelism in ion implanters | Anthony Renau | 2002-08-20 |
| 6403972 | Methods and apparatus for alignment of ion beam systems using beam current sensors | Antonella Cucchetti, Leo V. Klos, Raymond L. Pelletier, Keith Pierce, Anthony Renau +1 more | 2002-06-11 |
| 6075249 | Methods and apparatus for scanning and focusing an ion beam | — | 2000-06-13 |