Issued Patents All Time
Showing 51–75 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10598832 | System and method for forming diffracted optical element having varied gratings | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi, Robert Masci | 2020-03-24 |
| 10545408 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, Anthony Renau, John Hautala | 2020-01-28 |
| 10377665 | Modifying bulk properties of a glass substrate | Ludovic Godet, Gary E. Dickerson | 2019-08-13 |
| 10302826 | Controlling etch angles by substrate rotation in angled etch tools | Rutger Meyer Timmerman Thijssen, Morgan Evans | 2019-05-28 |
| 10192727 | Electrodynamic mass analysis | Frank Sinclair, Costel Biloiu, Alexandre Likhanskii, Peter F. Kurunczi | 2019-01-29 |
| 10113229 | Techniques for controlling ion/neutral ratio of a plasma source | Tsung-Liang Chen, John Hautala, Shurong Liang | 2018-10-30 |
| 9437392 | High-throughput ion implanter | William T. Weaver, Charles T. Carlson, James P. Buonodono, Paul Sullivan | 2016-09-06 |
| 9377692 | Electric/magnetic field guided acid diffusion | Peng Xie, Ludovic Godet, Tristan Y. Ma, Christopher Dennis Bencher | 2016-06-28 |
| 9269536 | Double ended electrode manipulator | Jon Ballou, Jeannot Morin, Manny Sieradzki | 2016-02-23 |
| 9269538 | Ion beam uniformity control using ion beam blockers | — | 2016-02-23 |
| 9269542 | Plasma cathode charged particle lithography system | Frank Sinclair | 2016-02-23 |
| 9190548 | Method of creating two dimensional doping patterns in solar cells | John W. Graff, Nicholas P. T. Bateman, Benjamin B. Riordon | 2015-11-17 |
| 9029811 | Apparatus to control an ion beam | Kenneth H. Purser, Christopher Campbell, Frank Sinclair, Robert C. Lindberg | 2015-05-12 |
| 9012337 | Platen control | Shengwu Chang, Frank Sinclair, Matthew P. McClellan, Antonella Cucchetti | 2015-04-21 |
| 9006692 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more | 2015-04-14 |
| 8993980 | Dual stage scanner for ion beam control | Kenneth H. Purser, Christopher Campbell, Frank Sinclair, Robert C. Lindberg | 2015-03-31 |
| 8974683 | Method and system for modifying resist openings using multiple angled ions | Ludovic Godet, Patrick M. Martin, Andrew J. Hornak | 2015-03-10 |
| 8937004 | Apparatus and method for controllably implanting workpieces | Anthony Renau, Ludovic Godet, Timothy J. Miller, Vikram Singh, James P. Buonodono +4 more | 2015-01-20 |
| 8884244 | Dual mode ion implanter | Kenneth H. Purser, Christopher Campbell, Frank Sinclair, Robert C. Lindberg | 2014-11-11 |
| 8853653 | Apparatus and techniques for controlling ion implantation uniformity | Stanislav S. Todorov, George M. Gammel, Richard Allen Sprenkle, Norman E. Hussey, Frank Sinclair +3 more | 2014-10-07 |
| 8841631 | Apparatus and techniques for controlling ion angular spread | Frank Sinclair, Edward W. Bell, Danielle Feldman | 2014-09-23 |
| 8809803 | Inductively coupled plasma ion source with multiple antennas for wide ion beam | Costel Biloiu, Edward W. Bell, Manny Sieradzki | 2014-08-19 |
| 8716682 | Apparatus and method for multiple slot ion implantation | Anthony Renau, Ludovic Godet, Timothy J. Miller | 2014-05-06 |
| 8698109 | Method and system for controlling critical dimension and roughness in resist features | Ludovic Godet, Christopher J. Leavitt, Patrick M. Martin | 2014-04-15 |
| 8590485 | Small form factor plasma source for high density wide ribbon ion beam generation | Costel Biloiu, Jay T. Scheuer, Frank Sinclair, Daniel Distaso | 2013-11-26 |