Issued Patents All Time
Showing 26–50 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402649 | System and method for optimally forming gratings of diffracted optical elements | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi | 2022-08-02 |
| 11397289 | Controlling etch angles by substrate rotation in angled etch tools | Rutger Meyer Timmerman Thijssen, Morgan Evans | 2022-07-26 |
| 11387073 | In situ angle measurement using channeling | Frank Sinclair, Jonathan Gerald England | 2022-07-12 |
| 11380578 | Formation of angled gratings | Rutger Meyer Timmerman Thijssen, Morgan Evans | 2022-07-05 |
| 11367589 | Modulation of ion beam angle | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2022-06-21 |
| 11335531 | Shadow mask apparatus and methods for variable etch depths | Morgan Evans, Thomas Soldi, Rutger Meyer Timmerman Thijssen, Maurice Emerson Peploski | 2022-05-17 |
| 11247298 | Method of forming a plurality of gratings | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2022-02-15 |
| 11226439 | System and method for forming surface relief gratings | Ludovic Godet, Costel Biloiu | 2022-01-18 |
| 11226441 | Methods of producing slanted gratings with variable etch depths | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2022-01-18 |
| 11205978 | Handling and processing double-sided devices on fragile substrates | Wayne MCMILLAN, Visweswaren Sivaramakrishnan, Ludovic Godet, Rutger Meyer Timmerman Thijssen, Naamah ARGAMAN | 2021-12-21 |
| 11195703 | Apparatus and techniques for angled etching using multielectrode extraction source | Peter F. Kurunczi, Morgan Evans | 2021-12-07 |
| 11193198 | Methods of forming devices on a substrate | Ludovic Godet, Rutger Meyer Timmerman Thijssen, Morgan Evans, Jinxin FU | 2021-12-07 |
| 11119405 | Techniques for forming angled structures | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2021-09-14 |
| 11069511 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Anthony Renau | 2021-07-20 |
| 11016228 | System and method for forming diffracted optical element having varied gratings | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi, Robert Masci | 2021-05-25 |
| 10990014 | Performance improvement of EUV photoresist by ion implantation | Tristan Y. Ma, Huixiong Dai, Anthony Renau, John Hautala | 2021-04-27 |
| 10935799 | Optical component having depth modulated angled gratings and method of formation | Rutger Meyer Timmerman Thijssen, Ludovic Godet, Morgan Evans | 2021-03-02 |
| 10930735 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Anthony Renau, Morgan Evans | 2021-02-23 |
| 10823888 | Methods of producing slanted gratings with variable etch depths | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2020-11-03 |
| 10818499 | Optical component having variable depth gratings and method of formation | John Hautala, Morgan Evans, Rutger Meyer Timmerman Thijssen | 2020-10-27 |
| 10795173 | System and method for optimally forming gratings of diffracted optical elements | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi | 2020-10-06 |
| 10775158 | System and method for detecting etch depth of angled surface relief gratings | Ludovic Godet, Rutger Meyer Timmerman Thijssen, Morgan Evans | 2020-09-15 |
| 10763072 | Apparatus, system and techniques for mass analyzed ion beam | Frank Sinclair, Costel Biloiu, Alexandre Likhanskii | 2020-09-01 |
| 10761334 | System and method for optimally forming gratings of diffracted optical elements | Morgan Evans, Rutger Meyer Timmerman Thijssen, Peter Kurunczi | 2020-09-01 |
| 10607847 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Anthony Renau, Morgan Evans | 2020-03-31 |