Issued Patents All Time
Showing 76–100 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Ming-Hsun Tsai +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Ming-Hsun Tsai, Li-Jui Chen, Heng-Hsin Liu, Cheng-Hao LAI +6 more | 2022-12-20 |
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2022-12-13 |
| 11513441 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Li-Jui Chen, Sheng-Kang Yu, Wei-Chun Yen | 2022-11-29 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-10-25 |
| 11467498 | Extreme ultraviolet control system | Jen-Yang Chung, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2022-10-11 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI +6 more | 2022-09-13 |
| 11437161 | Lithography apparatus and method for using the same | Chun-Lin Chang, Chieh Hsieh, Han-Lung Chang, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |
| 11392040 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Gwan Sin Chang +5 more | 2022-07-19 |
| 11392041 | Particle removal device and method | Cheng-Hsuan Wu, Ming-Hsun Tsai, Li-Jui Chen, Heng-Hsin Liu | 2022-07-19 |
| 11378894 | Lithography system with an embedded cleaning module | Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2022-07-05 |
| 11360392 | Photolithography device having illuminator and method for adjusting intensity uniformity | Che-Chang Hsu, Chieh-Jen Cheng, Li-Jui Chen, Chao-Chen Chang, Ssu-Yu Chen | 2022-06-14 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11320744 | Method and apparatus for controlling extreme ultraviolet light | Ssu-Yu Chen, Li-Jui Chen | 2022-05-03 |
| 11297710 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Ssu-Yu Chen, Li-Jui Chen | 2022-04-05 |
| 11287755 | Lithography system and cleaning method thereof | Sheng-Ta Lin, Li-Jui Chen | 2022-03-29 |
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-03-15 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Ming-Hsun Tsai, Li-Jui Chen | 2022-03-15 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2022-03-08 |
| 11272606 | EUV light source and apparatus for lithography | Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen, Tzung-Chi Fu +1 more | 2022-03-08 |
| 11256179 | Mask cleaning | Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Ming-Chin Chien +2 more | 2022-02-22 |
| 11243479 | Method of operating semiconductor apparatus and semiconductor apparatus | Hsiang Chen, Sheng-Kang Yu, Li-Jui Chen | 2022-02-08 |
| 11237482 | Process system and operating method thereof | Chao-Chen Chang, Shao-Wei Luo, Jen-Yang Chung, Li-Jui Chen, Po-Chung Cheng | 2022-02-01 |