Issued Patents All Time
Showing 101–125 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2022-01-11 |
| 11172566 | Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator | Jen-Hung Hsiao, Po-Chung Cheng, Li-Jui Chen | 2021-11-09 |
| 11166361 | Method and device for measuring contamination in EUV source | Kuan-Hung Chen, Li-Jui Chen, Po-Chung Cheng | 2021-11-02 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Li-Jui Chen, Yen-Shuo Su, Chieh Hsieh +1 more | 2021-10-19 |
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2021-08-17 |
| 11073746 | Image-capturing assembly | Kuo-Hao Peng, Yao-Chung Chang | 2021-07-27 |
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Chi YANG, Sheng-Ta Lin, Li-Jui Chen, Po-Chung Cheng | 2021-07-20 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-04-27 |
| 10990026 | Lithography apparatus and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Li-Jui Chen, Po-Chung Cheng | 2021-04-27 |
| 10976672 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Ming-Chin Chien +1 more | 2021-04-13 |
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Jen-Yang Chung, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2021-04-06 |
| 10955752 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Li-Jui Chen, Sheng-Kang Yu, Wei-Chun Yen | 2021-03-23 |
| 10955750 | Lithography system and method thereof | Wei-Chun Yen, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2021-03-23 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |
| 10942459 | Lithography system and cleaning method thereof | Sheng-Ta Lin, Li-Jui Chen | 2021-03-09 |
| 10928741 | Radiation source for lithography process | Shang-Ying WU, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2021-02-23 |
| 10925142 | EUV radiation source for lithography exposure process | Chun-Chia Hsu, Kuan-Hung Chen, Li-Jui Chen, Po-Chung Cheng | 2021-02-16 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang +3 more | 2020-12-29 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Che-Chang Hsu, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10880981 | Collector pellicle | Chi-Ming Yang, Jen-Yang Chung, Shao-Wei Luo, Tzung-Chi Fu, Chun-Kuang Chen +2 more | 2020-12-29 |
| 10877190 | Extreme ultraviolet radiation source | Chi-Ming Yang, Sheng-Ta Lin, Jen-Yang Chung, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10871719 | EUV metal droplet catchers | Sheng-Ta Lin, Po-Chung Cheng, Li-Jui Chen | 2020-12-22 |
| 10859918 | Semiconductor apparatus and method of operating the same | Kuan-Hung Chen, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |