Issued Patents All Time
Showing 151–162 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9665007 | Rotary EUV collector | Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2017-05-30 |
| 9664999 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2017-05-30 |
| 9607833 | System and method for photomask particle detection | Shu-Hao Chang, Hsiang-Yu Chou, Kuo-Chang Kau, Shun-Der Wu, Chia-Chen Chen +1 more | 2017-03-28 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Chia-Jen Chen, Chia-Ching Huang | 2017-01-31 |
| 9442368 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-09-13 |
| 9429858 | Rotary EUV collector | Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2016-08-30 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-02-09 |
| 9159559 | Lithography layer with quenchers to prevent pattern collapse | Shu-Hao Chang, Jui-Ching Wu, Jeng-Horng Chen, Anthony Yen | 2015-10-13 |
| 9140987 | Method for lithography patterning | Shu-Hao Chang, Hsiang-Yu Chou, Ming-Chin Chien, Jui-Ching Wu, Jeng-Horng Chen | 2015-09-22 |
| 9046776 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Chia-Jen Chen, Chia-Ching Huang | 2015-06-02 |
| 8988652 | Method and apparatus for ultraviolet (UV) patterning with reduced outgassing | Shu-Hao Chang, Tsiao-Chen Wu, Chia-Hao Hsu, Chia-Chen Chen, Ying-Yu Chen +3 more | 2015-03-24 |
| 7956526 | Organic electro-luminescence device with organic light emitting layer having particular ratio of contents | Fang-Chung Chen, Yung-Shiuan Chen, Chi-Neng Mo, Chien-Lung Tsou, Jan-Tian Lian | 2011-06-07 |