Issued Patents All Time
Showing 126–150 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859928 | EUV light source and apparatus for lithography | Yu-Chih Chen, Sheng-Kang Yu, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10842009 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2020-11-17 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10802406 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Liu Bo-Tsun, Li-Jui Chen +1 more | 2020-10-13 |
| 10802405 | Radiation source for lithography exposure process | Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2020-10-13 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Chi-Ming Yang, Che-Chang Hsu, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10725384 | Communication control method | Chao-Chen Chang, Shao-Wei Luo, Li-Jui Chen, Po-Chung Cheng | 2020-07-28 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10687410 | Extreme ultraviolet radiation source and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Li-Jui Chen, Po-Chung Cheng | 2020-06-16 |
| 10685846 | Semiconductor integrated circuit fabrication with pattern-reversing process | Ming-Chin Chien, Jui-Ching Wu, Shu-Hao Chang, Jen-Yang Chung, Kuo-Chang Kau +1 more | 2020-06-16 |
| 10678138 | Extreme ultraviolet (EUV) radiation source and a method for generating extreme ultraviolet radiation | Wei-Chun Yen, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-06-09 |
| 10656539 | Radiation source for lithography process | Shang-Ying WU, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2020-05-19 |
| 10512147 | Extreme ultraviolet radiation source and droplet catcher thereof | Chi-Ming Yang, Sheng-Ta Lin, Ssu-Yu Chen, Li-Jui Chen, Po-Chung Cheng | 2019-12-17 |
| 10506698 | EUV source generation method and related system | Chun-Lin Chang, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng +1 more | 2019-12-10 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2019-12-03 |
| 10477663 | Light source for lithography exposure process | Chieh Hsieh, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2019-11-12 |
| 10459352 | Mask cleaning | Shu-Hao Chang, Norman Chen, Jeng-Horng Chen, Kuo-Chang Kau, Ming-Chin Chien +2 more | 2019-10-29 |
| 10459353 | Lithography system with an embedded cleaning module | Jeng-Horng Chen, Jui-Ching Wu, Chia-Chen Chen, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2019-10-29 |
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2019-10-01 |
| 10314154 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2019-06-04 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Chia-Chen Chen, Shu-Hao Chang, Ming-Chin Chien +1 more | 2019-04-30 |
| 10274844 | Lithography apparatus and method for protecting a reticle | Jen-Yang Chung, Chieh Hsieh, Li-Jui Chen, Po-Chung Cheng | 2019-04-30 |
| 10162277 | Extreme ultraviolet lithography system with debris trapper on exhaust line | Jye-Fu Jeng, Shih-Chang Shih, Kun-Jin Wu, Guan-Heng Liu, Jen-Yang Chung +2 more | 2018-12-25 |
| 10067418 | Particle removal system and method thereof | Shu-Hao Chang, Chi-Lun Lu, Ming-Chin Chien, Jui-Ching Wu, Jeng-Horng Chen +2 more | 2018-09-04 |