Issued Patents All Time
Showing 51–75 of 351 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435817 | Multi-power management system and operation method thereof | Chien-Lee Liu, Tzu-Chiang Mi, Yi-Hsun Lin | 2022-09-06 |
| 11429027 | Photolithography method and apparatus | Shinn-Sheng Yu, Ru-Gun Liu, Hsu-Ting Huang | 2022-08-30 |
| 11422465 | Extreme ultraviolet photoresist with high-efficiency electron transfer | Wei-Han Lai, Chien-Wei Wang | 2022-08-23 |
| 11411113 | FinFETs and methods of forming FinFETs | Tai-Chun Huang, Tien-I Bao | 2022-08-09 |
| 11387104 | Grafting design for pattern post-treatment in semiconductor manufacturing | Siao-Shan Wang, Ching-Yu Chang | 2022-07-12 |
| 11378884 | Extreme ultraviolet photoresist and method | Chen-Yu Liu, Ya-Ching Chang, Cheng-Han Wu, Ching-Yu Chang | 2022-07-05 |
| 11342193 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Chih-Ming Lai, Wei-Liang Lin, Yung-Sung Yen, Ken-Hsien Hsieh | 2022-05-24 |
| 11320747 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Shinn-Sheng Yu, Ru-Gun Liu, Hsu-Ting Huang, Kenji Yamazoe, Minfeng Chen +1 more | 2022-05-03 |
| 11307504 | Humidity control in EUV lithography | An-Ren Zi, Ching-Yu Chang, Joy Cheng | 2022-04-19 |
| 11300878 | Photoresist developer and method of developing photoresist | An-Ren Zi, Ching-Yu Chang, Joy Cheng | 2022-04-12 |
| 11295961 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Wei-Han Lai, Ching-Yu Chang | 2022-04-05 |
| 11294286 | Pattern formation method using a photo mask for manufacturing a semiconductor device | Ru-Gun Liu, Cheng-I Huang, Chih-Ming Lai, Chien-Wen Lai, Ken-Hsien Hsieh +2 more | 2022-04-05 |
| 11289332 | Directional processing to remove a layer or a material formed over a substrate | Shih-Chun Huang, Chien-Wen Lai, Ru-Gun Liu, Wei-Liang Lin, Ya Hui Chang +3 more | 2022-03-29 |
| 11287740 | Photoresist composition and method of forming photoresist pattern | An-Ren Zi, Ching-Yu Chang | 2022-03-29 |
| 11281107 | Method for performing lithography process with post treatment | Ming-Hui Weng, Ching-Yu Chang | 2022-03-22 |
| 11276568 | Method for manufacturing a semiconductor device and a coating material | Yu Ling Chien, Chien-Chih Chen, Ching-Yu Chang, Yahru Cheng | 2022-03-15 |
| 11262659 | Method of cleaning extreme ultraviolet lithography collector | An-Ren Zi, Ching-Yu Chang | 2022-03-01 |
| 11239078 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang +7 more | 2022-02-01 |
| 11215924 | Photoresist, developer, and method of forming photoresist pattern | An-Ren Zi, Ching-Yu Chang | 2022-01-04 |
| 11162777 | Wafer alignment mark scheme | Wei-Hsiang Tseng, Heng-Hsin Liu, Jui-Chun Peng, Ho-Ping Chen | 2021-11-02 |
| 11164956 | Capping layer for gate electrodes | Teng-Chun Tsai, Akira Mineji, Huang-Lin Chao | 2021-11-02 |
| 11158509 | Pattern fidelity enhancement with directional patterning technology | Yu-Tien Shen, Chi-Cheng Hung, Chien-Wei Wang, Ching-Yu Chang, Chih-Yuan Ting +7 more | 2021-10-26 |
| 11150561 | Method and apparatus for collecting information used in image-error compensation | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Li-Jui Chen +1 more | 2021-10-19 |
| 11153957 | Apparatus and method for generating an electromagnetic radiation | Tzu-Jeng Hsu, Chi-Ming Yang, Chyi Shyuan Chern, Jui-Chun Peng, Heng-Hsin Liu | 2021-10-19 |
| 11143963 | Negative tone developer for extreme ultraviolet lithography | Chen-Yu Liu, Wei-Han Lai, Tzu-Yang Lin, Ming-Hui Weng, Ching-Yu Chang | 2021-10-12 |