Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360460 | System and method for selecting photolithography processes | Shih-Ming Chang, Ken-Hsien Hsieh | 2025-07-15 |
| 12354873 | System and method for multiple step directional patterning | Chih-Kai Yang, Hsiang-Ming CHANG, Chun-Yen Chang, Ya Hui Chang, Wei-Ting Chien +2 more | 2025-07-08 |
| 12347681 | Method of forming a semiconductor device | Chia-Cheng Chen, Chun-Hung Wu, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo +3 more | 2025-07-01 |
| 12334342 | Pattern fidelity enhancement | Ya-Wen Yeh, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2025-06-17 |
| 12230507 | Method of manufacturing semiconductor devices using directional process | Ya-Wen Yeh, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2025-02-18 |
| 12153350 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Huicheng Chang, Chia-Cheng Chen, Jyu-Horng Shieh, Liang-Yin Chen +7 more | 2024-11-26 |
| 12094691 | Etch apparatus for compensating shifted overlayers | Chun-Yen Chang, Chih-Kai Yang, Ya Hui Chang, Shih-Ming Chang | 2024-09-17 |
| 12027368 | Method for fabricating semiconductor device | Chih-Kai Yang, Hsiang-Ming CHANG, Chun-Yen Chang, Ya Hui Chang, Wei-Ting Chien +2 more | 2024-07-02 |
| 11955338 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2024-04-09 |
| 11901190 | Method of patterning | Chin-Yuan Tseng, Wei-Liang Lin, Chih-Ming Lai, Kuo-Cheng Ching, Shi Ning Ju +2 more | 2024-02-13 |
| 11901188 | Method for improved critical dimension uniformity in a semiconductor device fabrication process | Chi-Cheng Hung, Chun-Kuang Chen, De-Fang Chen, Wei-Liang Lin | 2024-02-13 |
| 11881401 | Method of forming metal features | Po-Chin Chang, Li-Te Lin, Ru-Gun Liu, Wei-Liang Lin, Pinyen Lin +1 more | 2024-01-23 |
| 11862465 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Po-Chin Chang, Chien-Wen Lai +7 more | 2024-01-02 |
| 11796922 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Huicheng Chang, Chia-Cheng Chen, Jyu-Horng Shieh, Liang-Yin Chen +7 more | 2023-10-24 |
| 11791161 | Pattern fidelity enhancement | Ya-Wen Yeh, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2023-10-17 |
| 11776810 | Method of forming a semiconductor device | Chia-Cheng Chen, Chun-Hung Wu, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo +3 more | 2023-10-03 |
| 11651972 | Method of manufacturing semiconductor devices using directional process | Ya-Wen Yeh, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2023-05-16 |
| 11569090 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2023-01-31 |
| 11289332 | Directional processing to remove a layer or a material formed over a substrate | Shih-Chun Huang, Chin-Hsiang Lin, Chien-Wen Lai, Ru-Gun Liu, Wei-Liang Lin +3 more | 2022-03-29 |
| 11289338 | Method for improved critical dimension uniformity in a semiconductor device fabrication process | Chi-Cheng Hung, Chun-Kuang Chen, De-Fang Chen, Wei-Liang Lin | 2022-03-29 |
| 11239078 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Po-Chin Chang, Chien-Wen Lai +7 more | 2022-02-01 |
| 11158509 | Pattern fidelity enhancement with directional patterning technology | Chi-Cheng Hung, Chin-Hsiang Lin, Chien-Wei Wang, Ching-Yu Chang, Chih-Yuan Ting +7 more | 2021-10-26 |
| 11094556 | Method of manufacturing semiconductor devices using directional process | Ya-Wen Yeh, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2021-08-17 |
| 11075079 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2021-07-27 |
| 11043381 | Directional patterning method | Po-Chin Chang, Li-Te Lin, Ru-Gun Liu, Wei-Liang Lin, Pinyen Lin +1 more | 2021-06-22 |