Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334342 | Pattern fidelity enhancement | Yu-Tien Shen, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2025-06-17 |
| 12230507 | Method of manufacturing semiconductor devices using directional process | Yu-Tien Shen, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2025-02-18 |
| 12153350 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Huicheng Chang, Chia-Cheng Chen, Jyu-Horng Shieh, Liang-Yin Chen +7 more | 2024-11-26 |
| 11955338 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2024-04-09 |
| 11881401 | Method of forming metal features | Po-Chin Chang, Li-Te Lin, Ru-Gun Liu, Wei-Liang Lin, Pinyen Lin +1 more | 2024-01-23 |
| 11862465 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai +7 more | 2024-01-02 |
| 11796922 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Huicheng Chang, Chia-Cheng Chen, Jyu-Horng Shieh, Liang-Yin Chen +7 more | 2023-10-24 |
| 11791161 | Pattern fidelity enhancement | Yu-Tien Shen, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2023-10-17 |
| 11651972 | Method of manufacturing semiconductor devices using directional process | Yu-Tien Shen, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2023-05-16 |
| 11569090 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2023-01-31 |
| 11289332 | Directional processing to remove a layer or a material formed over a substrate | Shih-Chun Huang, Chin-Hsiang Lin, Chien-Wen Lai, Ru-Gun Liu, Wei-Liang Lin +3 more | 2022-03-29 |
| 11239078 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai +7 more | 2022-02-01 |
| 11094556 | Method of manufacturing semiconductor devices using directional process | Yu-Tien Shen, Shih-Chun Huang, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2021-08-17 |
| 11075079 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2021-07-27 |
| 11043381 | Directional patterning method | Po-Chin Chang, Li-Te Lin, Ru-Gun Liu, Wei-Liang Lin, Pinyen Lin +1 more | 2021-06-22 |
| 10861698 | Pattern fidelity enhancement | Yu-Tien Shen, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2020-12-08 |
| 10707081 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai +7 more | 2020-07-07 |
| 10354874 | Directional processing to remove a layer or a material formed over a substrate | Shih-Chun Huang, Chin-Hsiang Lin, Chien-Wen Lai, Ru-Gun Liu, Wei-Liang Lin +3 more | 2019-07-16 |