Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861698 | Pattern fidelity enhancement | Ya-Wen Yeh, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen, Wei-Hao Wu +3 more | 2020-12-08 |
| 10714357 | Methods for improved critical dimension uniformity in a semiconductor device fabrication process | Chi-Cheng Hung, Chun-Kuang Chen, De-Fang Chen, Wei-Liang Lin | 2020-07-14 |
| 10707081 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Po-Chin Chang, Chien-Wen Lai +7 more | 2020-07-07 |
| 10658184 | Pattern fidelity enhancement with directional patterning technology | Chi-Cheng Hung, Chin-Hsiang Lin, Chien-Wei Wang, Ching-Yu Chang, Chih-Yuan Ting +7 more | 2020-05-19 |
| 10354874 | Directional processing to remove a layer or a material formed over a substrate | Shih-Chun Huang, Chin-Hsiang Lin, Chien-Wen Lai, Ru-Gun Liu, Wei-Liang Lin +3 more | 2019-07-16 |
| 10032639 | Methods for improved critical dimension uniformity in a semiconductor device fabrication process | Chi-Cheng Hung, Chun-Kuang Chen, De-Fang Chen, Wei-Liang Lin | 2018-07-24 |