Issued Patents All Time
Showing 26–50 of 351 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11971657 | Photoresist developer and method of developing photoresist | An-Ren Zi, Ching-Yu Chang, Yahru Cheng | 2024-04-30 |
| 11966162 | Photoresist composition and method of manufacturing a semiconductor device | Tzu-Yang Lin, Ching-Yu Chang | 2024-04-23 |
| 11955338 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2024-04-09 |
| 11935757 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Wei-Han Lai, Ching-Yu Chang | 2024-03-19 |
| 11886121 | Method for forming patterned photoresist | Chun-Chih HO, Ching-Yu Chang | 2024-01-30 |
| 11862465 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang +7 more | 2024-01-02 |
| 11852966 | Lithography mask with a black border regions and method of fabricating the same | Chien-Cheng Chen, Hsin-Chang Lee, Chia-Jen Chen, Pei-Cheng Hsu, Yih-Chen Su +2 more | 2023-12-26 |
| 11841619 | Method for mask data synthesis with wafer target adjustment | Hsu-Ting Huang, Tung-Chin Wu, Shih-Hsiang Lo, Chih-Ming Lai, Jue-Chin Yu +1 more | 2023-12-12 |
| 11822238 | Extreme ultraviolet photolithography method with developer composition | An-Ren Zi, Joy Cheng, Ching-Yu Chang | 2023-11-21 |
| 11821089 | Control system for plasma chamber having controllable valve | Yen-Shuo Su, Ying Xiao | 2023-11-21 |
| 11809080 | Extreme ultraviolet photoresist with high-efficiency electron transfer | Wei-Han Lai, Chien-Wei Wang | 2023-11-07 |
| 11764068 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Chih-Ming Lai, Wei-Liang Lin, Yung-Sung Yen, Ken-Hsien Hsieh | 2023-09-19 |
| 11754923 | Resist dispensing system and method of use | Ya-Ching Chang, Chen-Yu Liu, Ching-Yu Chang | 2023-09-12 |
| 11709435 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Shinn-Sheng Yu, Ru-Gun Liu, Hsu-Ting Huang, Kenji Yamazoe, Minfeng Chen +1 more | 2023-07-25 |
| 11703765 | Photoresist composition and method of manufacturing a semiconductor device | Tzu-Yang Lin, Ching-Yu Chang | 2023-07-18 |
| 11664268 | Dummy fin structures and methods of forming same | Keng-Chu Lin, Shwang-Ming Jeng, Teng-Chun Tsai, Tsu-Hsiu Perng, Fu-Ting Yen | 2023-05-30 |
| 11656553 | Method for forming semiconductor structure | Li-Yen Lin, Ching-Yu Chang | 2023-05-23 |
| 11626293 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Wei-Han Lai, Ching-Yu Chang | 2023-04-11 |
| 11626285 | Method of manufacturing a semiconductor device | An-Ren Zi, Ching-Yu Chang | 2023-04-11 |
| 11605538 | Protective composition and method of forming photoresist pattern | An-Ren Zi, Ching-Yu Chang | 2023-03-14 |
| 11594528 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Li-Jui Chen +1 more | 2023-02-28 |
| 11581217 | Method for forming vias and method for forming contacts in vias | Tzu-Yang Lin, Cheng-Han Wu, Ching-Yu Chang | 2023-02-14 |
| 11569090 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2023-01-31 |
| 11495460 | Method for forming semiconductor structure by patterning resist layer having inorganic material | An-Ren Zi, Ching-Yu Chang | 2022-11-08 |
| 11435817 | Multi-power management system and operation method thereof | Chien-Lee Liu, Tzu-Chiang Mi, Yi-Hsun Lin | 2022-09-06 |