Issued Patents All Time
Showing 126–150 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541291 | Reduction of feature critical dimensions | Sean S. Kang, Sangheon Lee, Wan-Lin Chen, S. M. Reza Sadjadi, Gan Ming Zhao | 2009-06-02 |
| 7521362 | Methods for the optimization of ion energy control in a plasma processing system | Kenji Takeshita, Odette Turmel, Felix Kozakevich | 2009-04-21 |
| 7491647 | Etch with striation control | S. M. Reza Sadjadi, Peter Cirigliano, Ji Soo Kim, Zhisong Huang | 2009-02-17 |
| 7479207 | Adjustable height PIF probe | Christopher Kimball, Douglas Keil, Alexei Marakhtanov | 2009-01-20 |
| 7455748 | Magnetic enhancement for mechanical confinement of plasma | Douglas Keil, Lumin Li, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa +1 more | 2008-11-25 |
| 7441331 | Turbine engine component manufacture methods | Benjamin R. Harding | 2008-10-28 |
| 7396769 | Method for stripping photoresist from etched wafer | Peter Cirigliano | 2008-07-08 |
| 7347915 | Plasma in-situ treatment of chemically amplified resist | Douglas Keil, Wan-Lin Chen, S. M. Reza Sadjadi, Mark Wilcoxson, Andrew D. Bailey, III | 2008-03-25 |
| 7319316 | Apparatus for measuring a set of electrical characteristics in a plasma | Christopher Kimball, Douglas Keil, Alexei Marakhtanov | 2008-01-15 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition | Seokmin Yun, Ji Zhu, Peter Cirigliano, Sangheon Lee, Thomas S. Choi +4 more | 2007-11-13 |
| 7273815 | Etch features with reduced line edge roughness | S. M. Reza Sadjadi | 2007-09-25 |
| 7255536 | Turbine airfoil platform cooling circuit | Frank J. Cunha, Eric L. Couch, Keith A. Santeler, Scott W. Gayman, Christopher R. Joe +1 more | 2007-08-14 |
| 7250371 | Reduction of feature critical dimensions | Sean S. Kang, Sangheon Lee, Wan-Lin Chen, S. M. Reza Sadjadi, Gan Ming Zhao | 2007-07-31 |
| 7241683 | Stabilized photoresist structure for etching process | S. M. Reza Sadjadi | 2007-07-10 |
| 7192531 | In-situ plug fill | Sean S. Kang, Sangheon Lee, Wan-Lin Chen, Reza Sadjadi | 2007-03-20 |
| 7144521 | High aspect ratio etch using modulation of RF powers of various frequencies | Camelia Rusu, Rajinder Dhindsa, Mukund Srinivasan, Lumin Li, Felix Kozakevich | 2006-12-05 |
| 7104756 | Temperature tolerant vane assembly | Benjamin R. Harding | 2006-09-12 |
| 7022611 | Plasma in-situ treatment of chemically amplified resist | Douglas Keil, Wan-Lin Chen, S. M. Reza Sadjadi, Mark Wilcoxson, Andrew D. Bailey, III | 2006-04-04 |
| 6972524 | Plasma processing system control | Alexei Marakhtanov, S. M. Reza Sadjadi | 2005-12-06 |
| 6969237 | Turbine airfoil cooling flow particle separator | — | 2005-11-29 |
| 6916746 | Method for plasma etching using periodic modulation of gas chemistry | James V. Tietz | 2005-07-12 |
| 6908846 | Method and apparatus for detecting endpoint during plasma etching of thin films | Brian McMillin, Jeffrey Marks | 2005-06-21 |
| 6780569 | Post-development treatment of patterned photoresist to promote cross-linking of polymer chains | Reza Sadjadi, Daxing Ren, Wan-Lin Chen, Douglas Keil, Peter Cirigliano | 2004-08-24 |
| 6562187 | Methods and apparatus for determining an etch endpoint in a plasma processing system | Jaroslaw W. Winniczek, M. J. Francois Chandrasekar Dassapa, Mark Wiepking | 2003-05-13 |
| 6255221 | Methods for running a high density plasma etcher to achieve reduced transistor device damage | Jaroslaw W. Winniczek, Joel M. Cook, Helen L. Maynard | 2001-07-03 |